Patents Assigned to Ionic Atlanta, Inc.
  • Spiral hollow cathode
    Patent number: 5007373
    Abstract: A spiral hollow cathode having adjacent layers which are equivalent to a two-dimensional array of small hollow cathodes. The cathode may be used for producing large area electron beams and for plasma-assisted deposition of films such as diamond over a large area without requiring heating external to the plasma itself.
    Type: Grant
    Filed: May 24, 1989
    Date of Patent: April 16, 1991
    Assignee: Ionic Atlanta, Inc.
    Inventors: Keith O. Legg, Yonhua Tzeng