Patents Assigned to IPEC/Westech Systems, Inc.
  • Semiconductor wafer carrier and method
    Patent number: 5423558
    Abstract: An improved semiconductor wafer carrier provides gimballing motion of the wafer to dynamically align the wafer to a polishing platen. This gimballing motion is achieved by providing a conical receptacle which has a spring friction fit with a spherical button. A torque plate with spring fingers provides the spring friction fit between the conical receptacle on the rotating shaft and the spherical button on the drive plate of the wafer carrier.
    Type: Grant
    Filed: March 24, 1994
    Date of Patent: June 13, 1995
    Assignee: IPEC/Westech Systems, Inc.
    Inventors: Joe E. Koeth, Melvin J. Hoffman, Paul D. Jackson