Patents Assigned to IQE PLC
  • Patent number: 11757008
    Abstract: Layered structures described herein include electronic devices with 2-dimensional electron gas between polar-oriented cubic rare-earth oxide layers on a non-polar semiconductor. Layered structure includes a semiconductor device, comprising a III-N layer or rare-earth layer, a polar rare-earth oxide layer grown over the III-N layer or rare-earth layer, a gate terminal deposited or grown over the polar rare-earth oxide layer, a source terminal that is deposited or epitaxially grown over the layer, and a drain terminal that is deposited or grown over the layer.
    Type: Grant
    Filed: February 15, 2019
    Date of Patent: September 12, 2023
    Assignee: IQE plc
    Inventors: Rytis Dargis, Andrew Clark, Richard Hammond, Rodney Pelzel, Michael Lebby
  • Publication number: 20230097643
    Abstract: A high electron mobility transistor comprising a nucleation layer having a first lattice constant, a back-barrier layer having a second lattice constant and a stress management layer having a third lattice constant which is larger than both first and second lattice constants. The stress management layer compensates some or all of the stress due to the lattice mismatch between the nucleation layer and back barrier layer so that the resulting structure experiences less bow and warp.
    Type: Application
    Filed: September 22, 2022
    Publication date: March 30, 2023
    Applicant: IQE plc
    Inventors: Felix Kaess, Chen-Kai KAO, Oleg LABOUTIN
  • Patent number: 11611001
    Abstract: A layered structure (100) for transmission of an acoustic wave, the layered structure (100) comprising: a substrate layer (102); and a second layer (104) over the substrate layer (102), wherein the second layer (104) comprises a plurality of discrete portions (105) adjacent to each other, each discrete portion (105) of the plurality of discrete portions (105) comprising a first subregion (104A) and a second subregion (104B). Also an epitaxial layer (108), grown over the second layer (104), for transmission of the acoustic wave in a major plane of the epitaxial layer (108), wherein a periodicity (?) of a wavelength of the acoustic wave to be transmitted through the epitaxial layer (108) is approximately equal to a sum of a width (dA) of the first subregion (104A) and a width (dB) of the second subregion (104B).
    Type: Grant
    Filed: April 14, 2021
    Date of Patent: March 21, 2023
    Assignee: IQE plc
    Inventors: Andrew Clark, Rodney Pelzel, Richard Hammond
  • Publication number: 20230040688
    Abstract: A multi-wavelength light-emitting semiconductor device and a method of fabricating the same are disclosed. The semiconductor device includes a substrate, a first reflector on the substrate, a light emission layer on the first reflector, second reflectors on corresponding active regions; and apertures on corresponding active regions. The light emission layer includes active regions. Each of the active regions includes a primary emission wavelength different from each other.
    Type: Application
    Filed: July 28, 2022
    Publication date: February 9, 2023
    Applicant: IQE plc
    Inventor: Andrew David JOHNSON
  • Patent number: 11495670
    Abstract: Systems and methods are described herein to include an epitaxial metal layer between a rare earth oxide and a semiconductor layer. Systems and methods are described to grow a layered structure, comprising a substrate, a first rare earth oxide layer epitaxially grown over the substrate, a first metal layer epitaxially grown over the rare earth oxide layer, and a first semiconductor layer epitaxially grown over the first metal layer. Specifically, the substrate may include a porous portion, which is usually aligned with the metal layer, with or without a rare earth oxide layer in between.
    Type: Grant
    Filed: January 25, 2019
    Date of Patent: November 8, 2022
    Assignee: IQE plc
    Inventors: Rodney Pelzel, Andrew Clark, Rytis Dargis, Michael Lebby, Richard Hammond
  • Patent number: 11355340
    Abstract: A layered structure for semiconductor application is described herein. The layered structure includes a starting material and a fully depleted porous layer formed over the starting material with high resistivity. In some embodiments, the layered structure further includes epitaxial layer grown over the fully depleted porous layer. Additionally, a process of making the layered structure including forming the fully depleted porous layer and epitaxial layer grown over the porous layer is described herein.
    Type: Grant
    Filed: January 14, 2020
    Date of Patent: June 7, 2022
    Assignee: IQE plc
    Inventors: Richard Hammond, Drew Nelson, Alan Gott, Rodney Pelzel, Andrew Clark
  • Patent number: 11251320
    Abstract: A layered structure used for detecting incident light includes a substrate having a surface with a high Miller index crystal orientation and a superlattice structure formed over the substrate at the surface. The superlattice structure is aligned to the high Miller index crystal orientation and exhibits a red-shifted long wave infrared response range based on the crystal orientation as compared to a superlattice structure formed over a substrate at a surface with a (100) crystal orientation.
    Type: Grant
    Filed: April 9, 2020
    Date of Patent: February 15, 2022
    Assignee: IQE plc
    Inventors: Dmitri Lubyshev, Joel Mark Fastenau, Amy Wing Kwan Liu, Michael Vincent Kattner, Philip Lee Frey, Scott Alan Nelson, Mark Justin Furlong
  • Patent number: 11201451
    Abstract: Embodiments described herein provide a layered structure that comprises a substrate that includes a first porous multilayer of a first porosity, an active quantum well capping layer epitaxially grown over the first porous multilayer, and a second porous multilayer of the first porosity over the active quantum well capping layer, where the second porous multilayer aligns with the first porous multilayer.
    Type: Grant
    Filed: January 18, 2019
    Date of Patent: December 14, 2021
    Assignee: IQE plc
    Inventors: Rich Hammond, Rodney Pelzel, Drew Nelson, Andrew Clark, David Cheskis, Michael Lebby
  • Patent number: 11133408
    Abstract: A passivated semiconductor device structure includes a III-nitride structure and a passivation layer. The III-nitride structure includes a high electron mobility transistor (HEMT). The passivation layer includes a dielectric, which is formed over the structure to provide passivation and forms an interface with the structure. The interface provides a transition between the structure and the dielectric having a thickness of at least two atomic layers. The interface also has a characteristic density of interface states less than a reference density of interface states that corresponds to a thickness of at most one atomic layer. The transition, which constitutes a rough interface, allows a relatively low density of interface states, and thus improves high-frequency performance of the device structure.
    Type: Grant
    Filed: August 6, 2019
    Date of Patent: September 28, 2021
    Assignee: IQE plc
    Inventors: Oleg Laboutin, Xiang Gao, Hugues Marchand
  • Patent number: 11133389
    Abstract: A layered structure for semiconductor application is described herein. The layered structure includes III-V semiconductor and uses pnictide nanocomposites to control lattice distortion in a series of layers. The distortion is tuned to bridge lattice mismatch between binary III-V semiconductors. In some embodiments, the layered structure further includes dislocation filters.
    Type: Grant
    Filed: February 5, 2020
    Date of Patent: September 28, 2021
    Assignee: IQE plc
    Inventors: Andrew Clark, Rodney Pelzel, Mukul Debnath, Rytis Dargis, Robert Yanka
  • Publication number: 20210257809
    Abstract: Systems and methods are described herein to grow a layered structure. The layered structure is implemented as a VCSEL and comprises a first germanium substrate layer having a first lattice constant, a second layer that has a second lattice constant and is epitaxially grown over the first germanium substrate layer, wherein the second layer comprises a compound of a first constituent and a second constituent, and a third layer that has a third lattice constant and is epitaxially grown over the second layer, wherein the third layer comprises a compound of a third constituent and a fourth constituent, wherein the first, second, third and fourth constituents are selected such that the layered structure is pseudomorphic and the first lattice constant is between the second lattice constant and the third lattice constant.
    Type: Application
    Filed: March 31, 2021
    Publication date: August 19, 2021
    Applicant: IQE plc
    Inventors: Andrew CLARK, Rodney PELZEL, Andrew JOHNSON, Andrew Martin JOEL, Aidan John DALY, Adam Christopher JANDL
  • Patent number: 11069825
    Abstract: An optoelectronic device includes an Sb-based metamorphic photodetector grown over a silicon substrate via a buffer layer. The device includes a layered structure. The layered structure can include a silicon substrate, a buffer layer formed over the Si substrate, and an infrared photodetector formed over the buffer layer. In some embodiments, the buffer layer includes a composite buffer layer having sublayers. For example, the composite buffer layer includes a Ge-based sublayer formed over the substrate, a III-As sublayer grown over the Ge-based sublayer, and a III-Sb sublayer formed over the III-As sublayer.
    Type: Grant
    Filed: May 28, 2019
    Date of Patent: July 20, 2021
    Assignee: IQE plc
    Inventors: Amy Wing Kwan Liu, Dmitri Lubyshev, Joel Mark Fastenau, Scott Alan Nelson, Michael Vincent Kattner, Philip Lee Frey, Matthew Fetters, Hubert Krysiak, Zhaoquan Zeng, Aled Owen Morgan, Stuart Andrew Edwards
  • Patent number: 11063114
    Abstract: In view of the high-temperature issues in III-N layer growth process, embodiments described herein use layered structure including a rare earth oxide (REO) or rare earth nitride (REN) buffer layer and a polymorphic III-N-RE transition layer to transit from a REO layer to a III-N layer. In some embodiments, the piezoelectric coefficient of III-N layer is increased by introduction of additional strain in the layered structure. The polymorphism of RE-III-N nitrides can then be used for lattice matching with the III-N layer.
    Type: Grant
    Filed: November 19, 2019
    Date of Patent: July 13, 2021
    Assignee: IQE plc
    Inventors: Rytis Dargis, Andrew Clark, Rodney Pelzel, Michael Lebby, Robert Yanka
  • Patent number: 10923345
    Abstract: Systems and methods are described herein for growing epitaxial metal oxide as buffer for epitaxial III-V layers. A layer structure includes a base layer and a first rare earth oxide layer epitaxially grown over the base layer. The first rare earth oxide layer includes a first rare earth element and oxygen, and has a bixbyite crystal structure. The layer structure also includes a metal oxide layer epitaxially grown directly over the first rare earth oxide layer. The metal oxide layer includes a first cation element selected from Group III and oxygen, and has a bixbyite crystal structure.
    Type: Grant
    Filed: March 16, 2017
    Date of Patent: February 16, 2021
    Assignee: IQE plc
    Inventors: Rytis Dargis, Andrew Clark, Rodney Pelzel
  • Patent number: 10825912
    Abstract: Systems and methods are described herein to include an epitaxial metal layer between a rare earth oxide and a semiconductor layer. Systems and methods are described to grow a layered structure, comprising a substrate, a first rare earth oxide layer epitaxially grown over the substrate, a first metal layer epitaxially grown over the rare earth oxide layer, and a first semiconductor layer epitaxially grown over the first metal layer.
    Type: Grant
    Filed: November 1, 2018
    Date of Patent: November 3, 2020
    Assignee: IQE plc
    Inventors: Rodney Pelzel, Andrew Clark, Rytis Dargis, Patrick Chin, Michael Lebby
  • Patent number: 10615141
    Abstract: A structure can include a III-N layer with a first lattice constant, a first rare earth pnictide layer with a second lattice constant epitaxially grown over the III-N layer, a second rare earth pnictide layer with a third lattice constant epitaxially grown over the first rare earth pnictide layer, and a semiconductor layer with a fourth lattice constant epitaxially grown over the second rare earth pnictide layer. A first difference between the first lattice constant and the second lattice constant and a second difference between the third lattice constant and the fourth lattice constant are less than one percent.
    Type: Grant
    Filed: June 2, 2017
    Date of Patent: April 7, 2020
    Assignee: IQE plc
    Inventors: Andrew Clark, Rytis Dargis, Michael Lebby, Rodney Pelzel
  • Patent number: 10605987
    Abstract: Systems and methods describe growing RE-based integrated photonic and electronic layered structures on a single substrate. The layered structure comprises a substrate, an epi-twist rare earth oxide layer over a first region of the substrate, and a rare earth pnictide layer over a second region of the substrate, wherein the first region and the second region are non-overlapping.
    Type: Grant
    Filed: January 18, 2019
    Date of Patent: March 31, 2020
    Assignee: IQE plc
    Inventors: Andrew Clark, Rich Hammond, Rytis Dargis, Michael Lebby, Rodney Pelzel
  • Patent number: 10580871
    Abstract: Nucleation layers for growth of III-nitride structures, and methods for growing the nucleation layers, are described herein. A semiconductor can include a silicon substrate and a nucleation layer over the silicon substrate. The nucleation layer can include silicon and deep-level dopants. The semiconductor can include a III-nitride layer formed over the nucleation layer. At least one of the silicon substrate and the nucleation layer can include ionized contaminants. In addition, a concentration of the deep-level dopants is at least as high as a concentration of the ionized contaminants.
    Type: Grant
    Filed: March 12, 2018
    Date of Patent: March 3, 2020
    Assignee: IQE plc
    Inventors: Oleg Laboutin, Chen-Kai Kao, Chien-Fong Lo, Wayne Johnson, Hugues Marchand
  • Patent number: 10573686
    Abstract: Proposed is a layer structure (1100, 1030) comprising a crystalline piezoelectric III-N layer (1110, 1032) epitaxially grown over a metal layer which is epitaxially grown over a rare earth oxide layer on a semiconductor (1102, 1002). The rare earth oxide layer includes at least two discrete portions (1104, 1004), and the metal layer includes at least one metal portion (1108, 1006) that partially overlaps adjacent discrete portions, preferably forming a bridge over an air gap (1008), particularly suitable for RF filters.
    Type: Grant
    Filed: June 19, 2017
    Date of Patent: February 25, 2020
    Assignee: IQE plc
    Inventors: Wang Nang Wang, Andrew Clark, Rytis Dargis, Michael Lebby, Rodney Pelzel
  • Patent number: 10566944
    Abstract: Layer structures for RF filters can be fabricated using rare earth oxides and epitaxial aluminum nitride, and methods for growing the layer structures. A layer structure can include an epitaxial crystalline rare earth oxide (REO) layer over a substrate, a first epitaxial electrode layer over the crystalline REO layer, and an epitaxial piezoelectric layer over the first epitaxial electrode layer. The layer structure can further include a second electrode layer over the epitaxial piezoelectric layer. The first electrode layer can include an epitaxial metal. The epitaxial metal can be single-crystal. The first electrode layer can include one or more of a rare earth pnictide, and a rare earth silicide (RESi).
    Type: Grant
    Filed: September 10, 2018
    Date of Patent: February 18, 2020
    Assignee: IQE plc
    Inventors: Rodney Pelzel, Rytis Dargis, Andrew Clark, Howard Williams, Patrick Chin, Michael Lebby