Abstract: The object of the present invention is to provide an inspection apparatus for liquid crystal drive substrates that improves the inspection accuracy of liquid crystal drive substrates, judges defect type more accurately, and does not cause a decrease in throughput.
Type:
Grant
Filed:
October 29, 2002
Date of Patent:
September 28, 2004
Assignee:
Ishiwawajima-Harima Heavy Industries Co., Ltd. & Sharp
Kabushiki Kaisha