Patents Assigned to Ishiwawajima-Harima Heavy Industries Co., Ltd. & Sharp Kabushiki Kaisha
  • Patent number: 6798231
    Abstract: The object of the present invention is to provide an inspection apparatus for liquid crystal drive substrates that improves the inspection accuracy of liquid crystal drive substrates, judges defect type more accurately, and does not cause a decrease in throughput.
    Type: Grant
    Filed: October 29, 2002
    Date of Patent: September 28, 2004
    Assignee: Ishiwawajima-Harima Heavy Industries Co., Ltd. & Sharp Kabushiki Kaisha
    Inventors: Yukihiro Iwasaki, Yutaka Nagasawa, Yoshikazu Yoshimoto