Abstract: The invention proposes a method for the optimization of the interferometric examination of scattering objects, wherein intensity-modulated light is divided, one beam is directed into an object and the other beam is directed to a reference mirror, the reflected light is guided to a detector module, where it is converted to an interference signal and this signal is evaluated. The method is characterized by the fact that light of at least two different central wavelengths is irradiated and the converted interference signals of both central wavelengths are phase-shifted in order to compensate for their expected dispersion.
Type:
Grant
Filed:
November 15, 2000
Date of Patent:
August 26, 2003
Assignee:
ISIS Optronics GmbH
Inventors:
Alexander Knuttel, Paul Welker, Christian Kugler, Reiner Rygiel