Abstract: It is sought to provide a spool valve arrangement, which can solve such problem as leaks of a pressure medium which may occur in the case of using synthetic resin for forming various spool valve component parts, can be manufactured at low cost, is richly durable and readily permits spool valve operation rate increase. A cylinder is fitted by clearance fit in a cylinder bore in a housing. Each socket is inserted through each first pressure medium port in the housing and each second pressure medium port in the cylinder. The socket has a small diameter part, which is fitted by clearance fit in the second pressure medium port, and a large diameter part, which is engaged with a shoulder formed in the first pressure medium port. By screwing a conduit end in the first pressure medium port, the socket is held in the mounted position, thus providing a seal of the region of this port and also providing an anti-rotation effect on the cylinder relative to the housing.

Abstract: The present invention is to provide a dual reciprocating bellows pump which can facilitate size reduction design of the whole pump, permit pump manufacture at low cost, and permit reducing the dead spaces in pumping chambers to provide improved self-suction performance.

Abstract: There is provided a pump system excellent in a maintenance ability and compatibility. The pump system comprises a pump (1) for transferring a liquid by alternately supplying air to air chambers (17a, 17b) to extend and contract a pair of bellows (13a, 13b) linked to a shaft (15). It also comprises a switching valve mechanism (2) for switching the air supplied to the pump (1). Switching mechanisms (40a, 40b) are employed to switch the pilot air for controlling the switching operation of the switching valve mechanism (2). The switching mechanisms are detachably attached to cases (16a, 16b) of the pump (1) from outside.

Abstract: A magnetic pump comprises a front casing (1) for forming an interior pump space (2) and having an inlet (3) for drawing in a fluid to be pumped and an outlet (4) for discharging the fluid, a rear casing (6) for forming a cylindrical space (5) extending from the pump space (2), a supporting shaft (7) having a rear end supported by a rear end of the rear casing (6) and a front end facing to the pump space (2), and a rotator (10) rotatably supported by the supporting shaft (7). The rotator (10) includes a totally cylindrical magnetic can (13) having an inner circumference on which a cylindrical rotary bearing mounted and an outer circumference on which a driven magnet is mounted, and an impeller (14) secured on a front end of the magnetic can (13) and accommodated in the pump space (2) so as to rotate integrally with the magnetic can (13). A rear bearing (19) is located at a rear end of the rotary bearing (11) via a cushion member (18).

Abstract: As tube-phragm pump includes a pump head (1) and an electromagnetic driver (2). The pump head (1) includes a cylinder (21) having a cylindrical space formed therein, and a cylindrical flexible tube (22) arranged coaxially within the cylindrical space of the cylinder (21). The outer space between the tube and the cylinder defines an actuator fluid space to be filled with an actuator fluid, and the inner space within the tube defines a pump chamber for conveying an object fluid. The pump head also includes an intake valve (31) attached to one end portion of the flexible tube (22) and a discharge valve (42) arranged at the other end portion of the flexible tube (22). The electromagnetic driver (2) includes a plunger (71) arranged reciprocally movable in the axial direction, an electromagnet for periodically attracting the plunger (71) to drive it in the axial direction reciprocally, and diaphragm (52).

Abstract: The present invention provides a substrate processing method including the coating step of coating a processing liquid on an object to be processed in a first processing unit of a processing chamber having first and second processing units, the step of conveying the object from the first processing unit to the second processing unit, the rinse step of rinsing an unnecessary processing liquid remaining on a peripheral portion of the object in the second processing unit to remove the unnecessary processing liquid, and the exposure step of conveying the rinsed object to an exposure apparatus to perform exposure processing for the object, wherein a time from the end of the rinse step for one object to be processed to the end of the rinse step for a next object to be processed is shorter than a time required for the exposure step for the one object.

Abstract: A tank for a pump is disclosed, which can accommodate a fluid for pumping, such as a chemical liquid. To a lower portion of a tank body which has a pump accommodation recess formed on one side, a weight member is removably secured. Prior to the securing, at the tank installation site the inner space of the weight member is filled with a weight material, such as water or sand, through an opening formed in the upper portion of the weight member. By so doing, when the residual quantity of the fluid for pumping in the tank body of the tank after the installation is reduced to be small, the tank is held in stable state by the weight of the weight member.

Abstract: A rear thrust bearing member is disposed to be in frictional contact with an axial end face of a spindle supported in a cantilever fashion in the neighborhood of and on the rear side of an impeller. Frictional heat that is generated in this part is satisfactorily diffused with a cooling effect provided by the rotation of the impeller in the pump casing and a heat diffusion effect provided by the circulating effect. Thus, a temperature rise of the frictional portions is suppressed, and adverse effects of heat on the surrounding member are prevented.

Abstract: An electromagnetically operated fixed displacement pump is sought, which can cope with diversification of electromagnetically operated fixed displacement pump products, and internationalization of their destination, readily permits cost reduction by mass production and permits efficient supply and control of products. A terminal portion electrically connected to the electromagnetic coil projects from the top of the pump body. A control unit with a control section for controlling the stroke number is removably mounted on the terminal unit. The pump body is supplied with current from lead pins of a power source connector provided on the control unit through the terminal portion. The control unit is prepared according to the specifications of various pump products. Various control units thus can be replaceably mounted on the terminal portion with the pump body as a common component. It is thus possible to provide pump products meeting various specifications.

Abstract: In a bellows pump, a bellows is vertically located and has an upper and a lower end sections. The upper end section is inserted in a mounting through hole of an upper frame portion. It is detachably mounted in the frame portion by engagement between projections and communicates with a pump head. The lower end section is detachably mounted by engagement between projections in an upper connecting end portion of a reciprocating member. A torque from a motor is received by a motion conversion mechanism including an eccentric cam member and a reciprocating member, and causes elongation and contraction of the bellows in vertical direction. A motor shaft is loosely engaged with the eccentric cam member, which is supported by a pin shaft and extends along a horizontal axis of the motor shaft.

Abstract: A communication hole is bored through a partition member which divides an intake-side priming fluid chamber from a discharge-side priming fluid chamber, whereby the two chambers are connected. The communication hole serves to prevent, on a predetermined level, a backflow of a pump fluid due to siphonage caused on the intake side when pumping operation is stopped, thereby securing a priming fluid in a pump casing. A valve assembly including a valve member is disposed corresponding to the communication hole. The valve member, which is always urged to an open position, is moved to and held in a position where it is caused to close the communication hole by the action of the pump fluid flowing in a feeding direction during pumping operation. When the pump is stopped to cause the backflow of the fluid, the valve member is moved back to the open position by the urging action.

Abstract: In an electromagnetically-operated fixed displacement pump, a lubricating oil storage tank and a communicating hole with one end opening upon the bottom of the tank are formed in a pump body, the other end of the hole in the pump body communicating with one end of another communicating hole extending through a movable armature in the axial direction thereof, the other end of the communicating hole in the armature opening into an electromagnetic gap between a fixed armature and the movable armature.

Abstract: A magnetically driven centrifugal pump comprises a split plate for dividing a space within a housing into two parts-impeller chamber and rotor chamber, a shaft supported by an inner wall of said rotor chamber and the split plate and having an internal rotor, an external rotor disposed outside the housing to magnetically drive the internal rotor, a passage means for permitting the communication between the impeller chamber and rotor chamber, and a restricting means for reducing the pressure of a fluid passing through said passage means.

Abstract: A magnetically driven centrifugal pump comprising an impeller rotatably supported in a casing by means of a hollow shaft; passage means including the through hole of said hollow shaft for conducting part of a fluid so as to cool said shaft; and an auxiliary pump for forcing the fluid through said passage means, thereby preventing the shaft from being thermally seized or damaged even when the discharge pressure of the pump suddenly drops.