Abstract: When removing a laminar deposit existing in a thin film forming operational system of a semiconductor manufacturing apparatus, a mixture gas prepared by mixing nitrogen trifluoride gas with a fluoric gas is introduced into the thin film forming operational system so as to be brought into contact in a non-plasma state with the laminar deposit.

Abstract: The pyrogen of the invention is formed by the compression of ferrosilicon powder and a mixture of ferric oxide powder and another lower order iron oxide powder. This pyrogen overcomes the weaknesses inherent in earlier pyrogens by dispensing with the use of peroxides. The scope of the invention also extends to the canister which holds the pyrogen. The pyrogen, which is positioned inside the canister's combustion chamber in such a way that it comes into contact with the top of said combustion chamber, is supported by a special ceramic thermal insulator which contains an ignition device comprising an ignition agent, which also incorporates an instant high temperature generating ignition material, and a match head chemical which projects out of a hole in the base cover of the canister. The bottom of the canister is covered by a bottom cap which can be freely removed or replaced as required. The canister, which enables the heating or cooking of whatever is placed inside it, is compact, safe and cheap.

Abstract: The pyrogen of the invention is formed by the compression of ferrosilicon powder and a mixture of ferric oxide powder and another lower order iron oxide powder. This pyrogen overcomes the weaknesses inherent in earlier pyrogens by dispensing with the use of peroxides. The scope of the invention also extends to the canister which holds the pyrogen. The pyrogen, which is positioned inside the canister's combustion chamber in such a way that it comes into contact with the top of said combustion chamber, is supported by a special ceramic thermal insulator which contains an ignition device comprising an ignition agent, which also incorporates an instant high temperature generating ignition material, and a match head chemical which projects out of a hole in the base cover of the canister. The bottom of the canister is covered by a bottom cap which can be freely removed or replaced as required. The canister, which enables the heating or cooking of whatever is placed inside it, is compact, safe and cheap.

Abstract: In a cryostat vacuum chamber encompassing a refrigerator and a sample table cooled by the refrigerator, a heater is provided for controlling a temperature of the sample table, and the refrigerator is also provided with separate heaters.

Abstract: In a mold material for use in molding a titanium cast to be mounted into the mouth as a dental prosthesis, magnesia and phosphate are added as a binder to its main ingredient composed of alumina and zirconia.