Abstract: An x-y coordinate is set on the surface of diffraction grating 3 with non-uniformly spaced grooves and expressed by the following series expansion which is a groove function describing a point (w,l) on the nth groove from the origin: 1 n = 1 σ ⁢ ∑ i , j ⁢ n i ⁢ ⁢ j ⁢ w i ⁢ l j ⁢ ⁢ ( i + j ≥ 1 )
Type:
Application
Filed:
July 10, 2002
Publication date:
January 23, 2003
Applicant:
Japan Atomic Energy Research Insititute