Abstract: A micro-optic device including a complicate structure and a movable mirror is made to be manufactured in a reduced length of time. A silicon substrate and a single crystal silicon device layer with an intermediate layer of silicon dioxide interposed therebetween defines a substrate on which a layer of mask material is formed and is patterned to form a mask having the same pattern as the configuration of the intended optical device as viewed in plan view. A surface which is to be constricted as a mirror surface is chosen to be in a plane of the silicon crystal. Using the mask, the device layer is vertically etched by a reactive ion dry etching until the intermediate layer is exposed. Subsequently, using KOH solution, a wet etching which is anisotropic to the crystallographic orientation is performed with an etching rate which is on the order of 0.1 ?m/min for a time interval on the order of ten minutes is performed to convert the sidewall surface of the mirror into a smooth crystallographic surface.

Abstract: In a connector having a rotary actuator (14) for bringing a sheet-like object (11) into press contact with a contact (13) held by a housing (12), the rotary actuator is engaged with the contact in a predetermined direction parallel to the sheet-like object and perpendicular to a center axis of a shaft portion (22) of the rotary actuator. The shaft portion is rotatably engaged with the housing. The contact has a contacting portion (15) to be faced to one surface of the sheet-like object and a supporting portion (16) to be faced to the other surface of the sheet-like object. The actuator has a cam portion (21) integrally connected to the shaft portion and located between the supporting portion and the sheet-like object. The supporting portion has a recess (17) which receives the cam portion to engage the cam portion with the supporting portion in the predetermined direction.

Abstract: There is provided an insertion and withdrawal connector apparatus in which a plurality of connectors can move only in a range of capable of engaging and separating with and from a plurality of mating connectors within a connector receiving body. A connector receiving body (1) has a pair of parallel frames (3), a pair of frame blocks (4) positioned at both end portions, and a plurality of partition members (5). One connector (10) and one mating connector are received in each of a plurality of space portions, that is, receiving chambers partitioned by a pair of frames, a pair of frame blocks, and a plurality of partition members. Each of the partition members has a pair of lances (5f, 5g) having a spring characteristic and each of the connectors has a pair of interlocking groove portions (10g) on both side surfaces.