Patents Assigned to Jenoptick Aktiengesellschaft
  • Publication number: 20010043850
    Abstract: An indexer for magazine shelves of a magazine and wafer-shaped objects contained therein has the object of ensuring accurate access in any desired and predeterminable magazine plane, also for magazines which are provided with an opening on only one removing and charging side, by means of an all-purpose indexing, wherein it is possible to differentiate between various standardized magazine and wafer formats The magazine shelves and the wafer-shaped objects are detected by an optoelectronic sensor arrangement, at least a portion of which is designed as a distance measuring system The indexer is applicable in the manufacture of integrated circuits, in particular, for handling wafer-shaped objects in the form of semiconductors and masks
    Type: Application
    Filed: July 26, 1996
    Publication date: November 22, 2001
    Applicant: Jenoptick Aktiengesellschaft
    Inventors: VOLKER SCHLEHAHN, KLAUS SCHULTZ