Abstract: The invention relates to a method for producing an optical component consisting of at least two individual parts, which together enclose an open cavity, wherein the timer sides delimiting the cavity are coated or structured, and from which previously material has been removed in zones in the region of the free aperture, wherein said region is recoated and the individual parts are connected to one another by wringing. The wringing height is greater than the removal height plus the height of the coating. The invention also relates to optical components which are produced according to this method.

Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by means of an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation.

Abstract: An arrangement for locking and unlocking a door of a container for increasing operating reliability when locking and unlocking in a simple manner and for ensuring an opening and closing of the transport container in automated operation. Particle generation is reduced at the same time. Locking elements within a door, which can move in and out, penetrate into recesses of the container to be closed when moved out along a curved path. The arrangement is particularly applicable in transport containers for wafer-shaped objects of larger diameter, in which removal and charging are effected individually in a plane parallel to the surface of the wafer-shaped object and whose container cover is removed and inserted laterally.

Abstract: A process is provided for measuring physical values of light-scattering moving particles by means of laser Doppler anemometry and to a corresponding laser Doppler anemometer (LDA) with phase modulation. Generating a moving intensity-modulated superimposition signal in the measured volume of a LDA which is based on an uncomplicated driving of the phase modulator is achieved by having the phase modulator being driven by two sinusoidal driving signals with different frequencies (.omega..sub.1, .omega..sub.2) which are coupled so as to be fixed with respect to phase and frequency and wherein one frequency (.omega..sub.2) is an integer multiple of the other frequency (.omega..sub.1), and a filter frequency (f.sub.F) which is a common multiple of the two frequencies (.omega..sub.1, .omega..sub.2) is filtered out from the output signal of the receiver by a bandpass filter.

Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by using an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation.

Abstract: The present invention is directed to an optical range measurement device which is able to compensate for lens contamination. The optical range measurement device includes one or more windows having at least two sections positioned at an angle to one another, a transmitter for producing a main beam and transmitting the main beam into the atmosphere, and a receiver for receiving the main beam back scattered by the atmosphere. The device also includes a transmitter producing a reference beam which illuminates the at least two sections and a receiver for receiving the reference beam.