Abstract: A method for the testing of optoelectronic chips which are arranged on a wafer and have electrical interfaces in the form of contact pads and optical interfaces which are arranged to be fixed relative thereto in the form of optical deflection elements, e.g., grating couplers, with a specific coupling angle. The wafer is adjusted in three adjustment steps with one of the chips relative to a contacting module such that the electrical interfaces of the chip and contacting module contact one another, and the optical interfaces of the chip and contacting module occupy a maximum position of the optical coupling.

Abstract: A device for handling disk-shaped objects in a handling plane of a local clean room has the object of ensuring process steps preceding or following the processing and inspection of the disk-shaped objects under the conditions of a local clean room with the use of SMIF boxes. The handling plane (H--H) is in a fixed constructional relationship with a reference plane (E--E) of at least one device comprising the magazine seat as a component part, which device serves to index the shelves of magazines and disk-shaped objects contained therein and is arranged above an intermediate base dividing the clean room into two partial spaces located one above the other, in which an air flow component of an air flow is directed from the partial space above the intermediate base into the partial space below the intermediate base. The device can be used in the manufacture of integrated circuits, particularly for handling tasks.

Abstract: An arrangement is produced for protection against harmful effects of radiation and for indicating such radiation which can preferably be designed as a viewing window or as goggles and can be used for protecting the eyes from injury due to high-intensity electromagnetic radiation. It includes a transparent substrate and a sequence of thin optical layers which are applied to this substrate and are arranged according to the principle of an optical thin-film resonance absorber system.

Abstract: A device for indexing magazine compartments of a magazine and wafer-shaped objects contained therein to ensure precise access of the removing and charging device in any given predetermined plane of the magazine regardless of dimensional tolerances. An optoelectronic sensor having a transmitter and receiver emits a bundle of measurement rays to detect the position of the wafer-shaped objects as well as the position of the magazine compartments relative to a reference plane whose location is rigidly defined by design with respect to a first handling plane for removing and charging. The magazine is adjustable vertically in a measurable manner for removal and charging by a magazine seat via a magazine lift. The device is applicable in the manufacture of integrated circuits, in particular for handling wafer-shaped objects.

Abstract: In order to transfer a magazine from a depositing position to a processing station, a linear drive for a rigid gripper arm is attached to a supporting column, an air passage opening being formed by the space between the supporting column and an elevator drive, this linear drive being vertically adjustable in the movement direction of the elevator. The range of action of the gripper arm is located above the magazine in the depositing position and is directed vertically to the movement direction of the elevator. All drive parts are separated from the clean room by a dust-tight enclosure and suction devices are arranged adjacent to openings through which the transport elements project into the clean room.

Abstract: The object of a device for transporting magazines for holding wafer-shaped objects is to ensure an exchange of gases within a SMIF box to the required extent at low cost and in an effective manner with respect to time in conformity to the working regimen associated with an SMIF system. A gas feed duct proceeding from closable ducts incorporated in the wall opens into gas distributing means. A gas discharge duct communicates with a gas outlet adjacent to the gas distribution means opposite the magazine. The device is preferably used in the fabrication of semiconductor chips.

Abstract: A device for identifying fingerprints by use of ultrasound having an electronic evaluating circuit, a hollow cylinder of length L with a cover and a base plate, wherein the ultrasonic speed through the liquid equals c' and the cover is made from a material with ultrasonic speed c". The outer side of the cover is planar to serve as a supporting surface for the fingerprint. The inner side is either convex (c'>c') or concave (c'<c") with a spherical radius R and the condition L=R/.vertline.(c"/c')-1.vertline. must be satisfied. The individual ultrasonic receiver is arranged in the center of the base plate and extends over the smallest possible surface area. At least one annular transmitter is arranged concentrically around the individual ultrasonic receiver.

Abstract: A rotating testing device can be connected to a base unit. A temperature sensor can also be connected to the base unit. The testing device has probe heads. The probe heads are immersed and rotated in the liquid concrete and the force required for rotation is measured in the base unit. Various concrete recipes are stored in a memory of the base unit. Data concerning the concrete are calculated by comparison with the force required to rotate the testing device with the force derived from a respective stored characteristic line and are read from a display field. A concrete recipe and specific measurements are selected by actuating keys which select the respective electronic processes in the base unit for measurement and comparison with stored characteristic data.

Abstract: A device according to the invention enables a high-precision adjustment of lenses or lens groups in a mounted high-performance lens system at any time. The lens or lens group to be adjusted is fixed in a lens mount which is held in a frictional engagement in a first mount. The fit clearance between the lens mount and first mount which is arranged in the high-performance lens system so as to be substantially virtually free of play radially is at least as great as the desired adjustment region. Piezoelectric translators are arranged in the wall region of the lens mount so as to be parallel to the optical axis and act against the contact-pressing force bringing about the frictional engagement during the adjustment process so that the force required for the displacement of the lens mount in the first mount via radially acting adjusting members is small.

Abstract: A phase-modulated interferometer has improved control and signal processing. Superimposition signals capable of evaluation in a phase-modulated interferometer without a complicated sawtooth control of the phase modulator are attained, in that two sinusoidal control signals which have modulation frequencies (.omega..sub.1, .omega..sub.2) and are rigidly coupled with respect to phase and frequency are applied to the known phase modulator and a cosine signal which is used in a conventional manner for evaluating the phase displacement is filtered of the superimposition signal generated in the interferometer by an electronic bandpass filter. At the filter frequency (.omega..sub.F) of the bandpass filter, an odd-number harmonic and an even-number harmonic of the two modulation frequencies (.omega..sub.1, .omega..sub.2) have the same frequency, when the amplitudes (.phi..sub.1, .phi..sub.2) of the control signals satisfy the condition for the suitable operating point of the phase modulator.

Abstract: A phase-modulated interferometer with novel control and signal processing utilizes superimposition signals capable of evaluation in a phase-modulated interferometer without complicated control of the phase modulator. A sinusoidal control signal with a modulation frequency (.omega..sub.0) having an amplitude (.psi..sub.0) is supplied to a known phase modulator. Multiplicative mixing of the superimposition signal produced in the interferometer from the measuring and reference arm with a sinusoidal signal of a determined mixing frequency (.omega..sub.M) which is rigidly coupled with respect to phase and frequency with the control signal is effected. When the amplitude (.psi..sub.0) of the control signal satisfies the condition for a suitable operating point of the phase modulator, a cosine signal conventionally used for evaluating the phase displacement is filtered out in an electronic bandpass filter at whose filter frequency (.omega..sub.

Abstract: A method and arrangements for determining an at least approximately circular contacting surface is disclosed. The primary object of finding a simple way of objectively determining the contacting surface of a deformable medium on a plane surface with high accuracy and at a low technical expense is met according to the invention in that a film waveguide is used as a plane surface. An incoherent, parallel, homogeneous bundle of light whose width widens one-dimensionally is coupled into this film waveguide and the decoupled light is fed to a photoreceiver array for recording one-dimensional intensity distributions. An evaluating unit generates a difference curve from a normal curve without contacting medium and from a measurement curve with contacting medium and the exact diameter of the contacting surface is determined from the distance of two associated extremes of the difference curve.

Abstract: A process and arrangements for photothermal spectroscopy (thermal wave analysis) by the single-beam method with double modulation technique. A single-beam method is developed making use of the advantages of double modulation technique in detecting the photothermally generated difference frequency without requiring partial beams and while achieving extensive absence of intermodulation, the intensity of the laser beam is modulated before striking the object in such a way that the modulation spectrum substantially contains a carrier frequency (f.sub.1) and two sideband frequencies (f.sub.1 .+-.F.sub.2), wherein f.sub.2 is the base clock frequency of the modulation, a regulating detector and a control loop intervening in the modulation process suppress that component of the base clock frequency (f.sub.2) in the same phase with the mixed frequency of the carrier frequency and sideband frequencies.

Abstract: Symmetrical carrier frequency interferometer for length, distance and speed measurements with beam-deflecting and beam-splitting elements, as well as a fixed reference mirror and a movable measurement mirror. The optically active surfaces positioned downstream of a first polarization-splitting layer are arranged in mirror-symmetrical manner with respect to the latter. Upstream of a second polarization-splitting layer inclined by 45.degree. a .lambda./2 plate is located in one of the two beam paths and in the passage direction behind said layer are located the .lambda./4 plate, the fixed reference mirror and the movable measurement mirror. There is at least one reversing element in the reflection direction.

Abstract: A process for the production of white and black oxide ceramic surface films on silicon-containing light metal cast alloys by plasma-chemical anodic oxidation. An aluminum cast alloy is pickled with nitric acid and hydrofluoric acid and coated by plasma-chemical anodic oxidation in an aqueous electrolyte. Accordingly, a coating variant is provided particularly for construction parts of silicon-containing light metal cast alloys having complicated shapes which enables the production of uniformly thin oxide ceramic surface films in contrast to conventional coating variants.

Abstract: A circuit arrangement for current supply in processes of electrochemically initiated plasma-chemical layer production. It is preferably applied in the plasma-chemical conversion of electrochemically pre-formed layers, e.g. on light metals. The output of the adjustable three-phase transformer with subsequently connected 6-pulse rectifier circuit is branched twice, wherein a first bridge circuit comprises a capacitor connected in parallel to a voltage sensor. A second bridge circuit contains a freewheeling diode parallel to the current limiting choke and the bath for process implementation. A pulse analyzer is arranged parallel to the latter, and the two bridge circuits are separated by a switch element.