Abstract: An apparatus for tracking items in a factory is disclosed. The apparatus is partially well suited for manufacturing environments wherein there are a plurality of items to be kept together in groups. The invention is particularly useful in semiconductor processing facilities wherein batches of semiconductor wafers to be processed are placed in wafer carriers which are, in turn, placed in work-in-progress boxes. Applying identification tags to one item that can be read and processed by a microterminal attached to the other item provides an effective way to prevent improper grouping of the items which can lead to misprocessing or handling of the batches of wafers.
Type:
Grant
Filed:
January 6, 1998
Date of Patent:
October 24, 2000
Assignee:
Jenoptik Infab, Inc.
Inventors:
Kenneth D. Van Antwerp, Jr., Bedford E. Hardee, Dennis L. Myers