Abstract: In a pump chamber connected to a liquid supply, an overlapping piezoelectric flexural transducer is disposed so that when voltage pulses are applied to produce an excursion, a number of droplets can be expelled from a nozzle array in the housing wall of the pump chamber using a plurality of nozzles. Gaps are formed between the edges lateral to the direction of overhang an the free end of the piezoelectric flexural transducer ad adjacent section of the housing wall. The nozzle array can be disposed in the projection of the plate surface of the piezoelectric flexural transducer in its direction of motion or in the extension of the piezoelectric flexural element or in another suitable pattern. As part of a combustion device the droplet mist generator is excellent for producing a combustible fuel-oxidant mixture.

Abstract: A method for manufacture of at least one micronozzle in an aerostatic bearing, wherein at least one hole is placed into a compacted bearing surface from porous sintered material by means of a laser beam and disposed so as to be distributed across the surface. The holes distributed across the compacted bearing surface constitute micronozzles of an aerostatic bearing.

Abstract: A miniature air bearing for supporting and guiding parts has a bearing surface of monocrystalline silicon. Nozzles are formed on the bearing surface by means of anisotropic etching for feeding air.