Patents Assigned to Johnson Matthey Electronics Inc.
  • Polycrystalline, metallic sputtering target
    Patent number: 6238494
    Abstract: Described is a polycrystalline, metallic sputtering target with a minimum of statically crystallized grain size difference in grain size at any location of less than about ±3%, as well as a dispersion in orientation content ratio of textures of less than about ±4% at any location.
    Type: Grant
    Filed: September 29, 1999
    Date of Patent: May 29, 2001
    Assignee: Johnson Matthey Electronics Inc.
    Inventor: Vladimir Segal