Patents Assigned to Joshin Uramoto
  • Sheet plasma sputtering method and an apparatus for carrying out the method
    Patent number: 4885068
    Abstract: A high-efficient sheet plasma sputtering method and an apparatus for carrying out the method which comprise means for deforming an arc plasma stream into a form of sheet by a magnetic field so that ions in the sheet plasma are accelerated to a target which is controlled to have a negative potential to the sheet plasma, whereby a coating layer is formed by sputtering on a substrate arranged opposite the target with respect to the sheet plasma.
    Type: Grant
    Filed: September 9, 1988
    Date of Patent: December 5, 1989
    Assignees: Joshin Uramoto, Asahi Glass Company, Ltd.
    Inventors: Joshin Uramoto, Koichi Suzuki, Takuji Oyama, Hiroyasu Kojima