Abstract: Provided are a novel organostannyl silicate compound, a method for preparing the same, a photoresist composition including the organostannyl silicate compound according to the present disclosure, and a method for forming a photoresist pattern using the composition. The organostannyl silicate compound of the present disclosure is industrially very useful, since the compound may implement a photoresist composition having excellent light sensitivity and etching resistance and a high-quality semiconductor device may be manufactured using the composition.
Type:
Application
Filed:
December 26, 2023
Publication date:
July 11, 2024
Applicants:
JSI SILICONE CO., INDUSTRY FOUNDATION OF CHONNAM NATIONAL UNIVERSITY
Inventors:
Yu Sun WON, Seung Hwan KANG, Hyun Tae JUNG, Hyun Dam JEONG, Ji Young BANG
Abstract: Provided is a method for producing (alkyl)arene compounds represented by Formulae 3-1, 3-2, and 3-3 by the Friedel-Crafts alkylation reaction of alkyl halide compounds and arene compounds using organic phosphine compounds as a catalyst.
Type:
Grant
Filed:
December 7, 2020
Date of Patent:
June 27, 2023
Assignee:
JSI SILICONE CO.
Inventors:
Il Nam Jung, A Ra Cho, Seung Hwan Kang, Young Min Kim