Patents Assigned to JSR Corportion
  • RADIATION-SENSITIVE COMPOSITION
    Publication number: 20120282550
    Abstract: A radiation-sensitive composition includes a polymer composition and a radiation-sensitive acid generator. The polymer composition includes a first polymer and a second polymer. The first polymer includes a repeating unit shown by a following formula (1). The second polymer includes a repeating unit shown by a following formula (2) and does not include a repeating unit shown by the formula (1).
    Type: Application
    Filed: June 20, 2012
    Publication date: November 8, 2012
    Applicant: JSR Corportion
    Inventors: Yuji YADA, Tooru Kimura, Tomohiro Utaka