Patents Assigned to Jusung Engineering Col, Ltd.
  • Gas valve assembly and apparatus using the same
    Patent number: 7381274
    Abstract: A gas valve assembly for a deposition apparatus includes: a driving shaft including a plurality of gas supply paths therein; a housing surrounding the driving shaft and including a plurality of through holes therein; a plurality of magnetic seal pairs between the driving shaft and the housing, the plurality of magnetic seal pairs including a magnetic fluid; and a leakage-preventing means between the driving shaft and the housing, the leakage-preventing means preventing a leakage of the magnetic fluid.
    Type: Grant
    Filed: June 16, 2004
    Date of Patent: June 3, 2008
    Assignee: Jusung Engineering Col, Ltd.
    Inventor: Sang-Gon Lee