Patents Assigned to JX Nippon Mining & Metals Corporatoin
  • Thin film comprising titanium oxide as main component and sintered compact sputtering target comprising titanium oxide as main component
    Patent number: 8501052
    Abstract: A thin film comprising titanium oxide as its main component, wherein the thin film includes titanium, oxygen and copper, content of Ti is 29.0 at % or higher and 34.0 at % or less and content of Cu is 0.003 at % or higher and 7.7 at % or less with remainder being oxygen and unavoidable impurities, and ratio of oxygen component to metal components, O/(2Ti+0.5Cu), is 0.96 or higher.
    Type: Grant
    Filed: January 29, 2010
    Date of Patent: August 6, 2013
    Assignee: JX Nippon Mining & Metals Corporatoin
    Inventors: Hideo Takami, Masataka Yahagi