Abstract: A semiconductor device includes a semiconductor substrate including first and second surfaces, and a first semiconductor layer of a first conductivity type, a first electrode on the first surface, a first control electrode that is inwardly from the first surface and electrically insulated from the semiconductor substrate and the first electrode, a second control electrode that is inwardly from the first surface, electrically insulated from the semiconductor substrate and the first electrode via a fourth insulating film, and biased independently from the first control electrode, a third control electrode on the second surface and electrically insulated from the semiconductor substrate, and a second electrode on the second surface and electrically connected to the semiconductor substrate.