Abstract: The specification describes a scanning electron microscope or similar equipment having a tiltable microscope column so as to observe a specimen at different angles without inclining the specimen. In order to make the microscope column tiltable relative to its specimen chamber, an opening is formed through a wall portion of the specimen chamber. The opening is covered up by a movable cover. A lower portion of the microscope column extends through the cover into the specimen chamber. A sealing member is provided so as to surround the opening between the wall portion and cover to ensure the hermetic sealing therebetween. Since the microscope is tilted instead of inclining the specimen stage to obtain images of the specimen seen at different angles, the specimen stage can be simplified in both structure and mechanism.

Abstract: The specification describes a scanning electron microscope or similar equipment having a magnetic pole piece detachably provided in an opening of a lower pole of its electromagnetic objective lens so as to decrease the magnetic flux leaked through the opening when the specimen is placed below the lower pole. The above scanning electron microscope or similar equipment may also include a change-over system for varying the crossing point between a scanning charged particle beam and an optical axis depending whether the specimen is placed in the vicinity of the lens center of the objective lens or below the lower pole. Accordingly, the specimen can be placed either below the lower pole of the objective lens or in the vicinity of the lens center as the operator desires, thereby making the scanning electron microscope or similar equipment applicable for varied purposes.

Abstract: The specification describes a scanning electron microscope or similar equipment capable of irradiating a plurality of beams of charged particles onto a specimen and displaying simultaneously the plurality of images of the specimen. It comprises charged particle beam modulation means to modulate the intensities of the beams of charged particles through their deflection by different frequencies, a detector capable of detecting secondary electrons or the like given off from the specimen, demodulation selector means capable of demodulating signals from the detector and selecting each specimen image signal, and display means capable of displaying the plurality of images of the specimen. The plurality of beams may be irradiated in parallel onto different spots on the specimen or may be directed to one specific spot on the specimen. Thus, a plurality of specimen images can be displayed extremely efficiently and, also, simultaneously by simple means.

Abstract: A hydraulic vibration tester comprises an actuator comprising a piston reciprocable in a cylinder connected with a vibration testing table and a direct drive type servo valve for supplying pressure fluid alternately to opposite ends of the cylinder. The servo valve comprises a spool valve member reciprocable in the bore of a valve body by a magnetic coil supplied with alternating current and located in a direct current magnetic field. At opposite ends of the spool valve member there are coned disc springs acting to bias the spool valve member to a median position and acting to allow only an axial reciprocating movement of the spool valve member at a frequency in the range of 650 Hz to 2000 Hz. The passages connecting the servo valve with the activator have a resonant frequency in the same range so as to achieve an effective vibration test in the high frequency range.

Abstract: This invention relates to a method of correcting astigmatism in scanning electron microscopes and similar equipment which insures accurate correction of astigmatism simply by matching an astigmatism-correcting image, appearing on part of a Braun tube screen, to a predetermined point (such as a mark) on the screen, instead of depending on skill and perception. The apparatus for correcting astigmatism in scanning electron microscopes and similar equipment according to this invention provides a simple structure to implement the above astigmatism correcting method, connecting the X direction astigmatism correcting system through a first switch to one of the horizontal and vertical scanning systems and the Y direction astigmatism correcting system through the second switch to the other thereof.

Abstract: A multiple electron lens having two axially spaced polepieces defining a space therebetween. The polepieces each have a plurality of axial through openings aligned coaxially defining electron beam paths. A sole anode plate is disposed axially spaced from the polepieces and has openings aligned with the openings defining the beam paths and equal in number thereto. Each beam path has an auxiliary exciting coil and a corresponding stigmator coaxially arranged with the related beam path within the space defined between the polepieces.

Abstract: A reference-load variable hardness tester for measuring Rockwell hardness and Rockwell superficial hardness, having an internal coil spring and an external coil spring disposed coaxially with a load shaft for each reference-load. When measuring Rockwell hardness, both the internal coil spring and the external coil spring work for the reference-load, and when measuring Rockwell superficial hardness, only the internal coil spring works for the reference-load.

Abstract: A microtome for stable production of continuously cut thin sections of a specimen for electronmicroscopic examination by an electromagnetic drive mechanism. Employing a lever hinged so as to swing in a dynamically balanced state, and a specimen holder attached to one end of the lever opposite to a knife, the electromagnetic mechanism drives the other end of the lever so that on every swinging of the lever the specimen is cut by the knife with accurate speed control for continuously cutting. Also, the electromagnetic drive realizes an automated specimen cutting cycle.

Abstract: An apparatus for positioning a loading shaft of hardness tester prior to application of test load. A loading shaft position detector is provided for detecting the arrival of the loading shaft at a given position when elevating it, and the detector controls an electromagnetic means to check further continuation of the elevating operation of the loading shaft so that the loading shaft is set automatically at the given position. An electromagnetic clutch or brake serves as the electromagnetic means.

Abstract: A hardness tester for measuring hardness of a material by pressing an indenter attached to the lower end of a load application shaft into the test specimen. A reference cylinder is coaxially and slidably fitted around the load application shaft, and a datum plane, to be in contact with the specimen, is formed at the lower end of the reference cylinder, so as to limit the penetration depth of the indenter into the specimen to a predetermined constant depth. A stop device is provided for regulating the descending of the load application shaft relative to the reference cylinder. A load detector for hardness measurement is interposed on the load application shaft, to measure the hardness of the specimen by measuring the force applied to produce an indentation of a predetermined size on it.

Abstract: A shock-absorbing mechanism for use in a dial gage where longitudinal motion of the spindle is converted to rotational motion of a pointer shaft gear by a pinion shaft rotated by said spindle and a magnifying gear coaxially and idlingly meshed with said pinion shaft, comprising a star-shaped pressure spring with radiately extending, elastic branches having not only elasticity in the axial direction of said pinion shaft but also high rigidity in the rotating direction thereof, and a dished spring bearing to deform said pressure spring so as to provide said axial elasticity, said star-shaped pressure spring and dished spring bearing being disposed coaxially with said magnifying gear and a stopper ring fixed on said pinion shaft so that the magnifying gear is pressed against the stopper ring in a frictionally contacted manner.

Abstract: A Rockwell hardness tester having a load application mechanism having a load transfer unit divided into an upper transfer member and a lower transfer member having bores through which an indenter shaft of the tester extends axially with some play. The transfer members are disposed coaxially and have a pair of balls therebetween horizontally arranged in a direction perpendicular to a knife edge on an upper end of the upper transfer member supporting a load application lever. The load transfer unit rests on a spring support cylinder with an initial load spring circumferentially thereof and having its lower convolutions resting on the expanded portion of the indenter shaft and the load applied to the tester is accordingly never applied eccentrically to the indenter shaft.

Abstract: An apparatus for releasably and adjustably mounting a specimen in an electron microscope. A specimen-holding unit is releasably and fluidtightly mounted in an evacuatable chamber and abutting the lens of the electron microscope in the mounted position. The unit is held in place by the pressure differential between the chamber and the atmosphere when the chamber is evacuated. The specimen-holding unit comprises a rotatable specimen-holding shaft disposed eccentrically within a rotatable support member. The specimen is variably positioned under the electron beam by the rotation of the member and the rotation of the shaft with respect to the member.