Abstract: Disclosed is a vaporizer constituted of a dispersing section 8 and a vaporizing section 22. The dispersing section 8 comprises a gas introduction port 4 for introducing a carrier gas 3 under pressure into a gas passage, means for feeding raw material solutions 5a and 5b to the gas passage, and a gas outlet 7 for delivering the carrier gas containing the raw material solutions to the vaporizing section 22. The vaporizing section 22 comprises a vaporizing tube 20 having one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outlet 7 of the dispersing section 8, and heating means for heating the vaporizing tube 20. The vaporizing section 22 serves to heat and vaporize the raw material solution containing carrier gas 3 delivered from the dispersing section 8. The dispersing section 8 includes a dispersing section body 1 having a cylindrical hollow portion, and a rod 10 having an outer diameter smaller than the inner diameter of the cylindrical hollow portion.

Abstract: A diaphragm valve comprises a body with an inflow passage and an outflow passage for fluid, a valve seat disposed around said inflow passage, and a diaphragm which are disposed on said valve seat and opens and closes between said inflow passage and said outflow passage, and a gas flow hole which connects said inflow passage to said outflow passage is disposed in said valve seat.

Abstract: The invention has its object to provide a diaphragm type high pressure shut-off valve which is simple in external shape, can realize miniaturization and is convenient in handling.The shut-off valve comprises a cylindrical housing (10) having a supply unit for compressed air at its end in an axial direction (Q), a piston (19) provided in the housing (10) and adapted to reciprocate in response to the compressed air, a return spring (20) provided in the housing (10) so as to permit the piston (19) to return, a rack portion (19A) provided to extend from the piston (19), a cam pinion (17) having a pinion portion (17B) provided integrally with the pinion portion (17B) and a rotating shaft (18) supported by the housing (10), and a diaphragm (7) adapted for movement in response to displacements of stems (9,13) and abutting against the cam face portion (17A) of the cam pinion (17).

Abstract: A manual control valve apparatus having a structure which is provided with, as a conversion mechanism, a diaphragm compressor which is held between a valve casing and a guide member, arcuate engaging grooves formed in a surface of the diaphragm presser opposite to the valve stem, and rolling elements which engage in a freely rolling manner in the engaging grooves and are supported by the lead end part of the valve stem. The bottom surfaces of the engaging grooves are made cam surfaces for causing reciprocating motion in the axial direction of the valve stem. An indicator possessing opening indicating portions indicating the rotational position of the valve stem is attached to the opposite end of the guide member from the valve casing, and furthermore, windows exposing the opening support portions are provided in an area from the circumferential wall of the handle to the end wall thereof.

Abstract: A diaphragm valve structure which is durable and has high reliability is obtained.In the diaphragm valve structure, a body 11, a valve seat 12, a seat holder 13, and a diaphragm 14, are provided; an inflow passage and an outflow passage for fluids and openings thereof are formed in body 11, valve seat 12 is disposed around the periphery of the opening of the inflow passage, the valve seat is pressed downward into body 11 by seat holder 13, diaphragm 14 comes into contact with valve seat 12 and places the opening in an airtight state, and thereby, movement of fluid between the inflow passage and the outflow passage is halted. At least two projecting parts are formed between the inflow passage and the outflow passage of this diaphragm valve structure; one of these two projecting parts is formed on valve seat 12, and the other projecting part is formed either on valve seat 12 or on seat holder 13.

Abstract: A supply control apparatus for semiconductor process gasses which is capable of accurately switching the timing of the supply state of the gasses flowing in accordance with the open or closed states of a plurality of gas pressure operated valves, which operate in response to a plurality of electromagnetic valves operating in time series. The content volumes of a plurality of gas tubes respectively connecting the plurality of electromagnetic valves to the plurality of drive units of the gas pressure operated valves are determined as a function of the length of time elapsed between the application of the control signal and the time the special gas is supplied to a process unit. The apparatus permits accurate switching of the supply state of the special gasses and avoids the mixing of the semiconductor process gasses.