Patents Assigned to Kabushiki Kaisha Nihon Micronics
  • Patent number: 11899054
    Abstract: A connecting device for inspection includes a probe head configured to hold electric contacts and optical contacts such that tip ends of the respective contacts are exposed on a lower surface of the probe head while proximal ends of the electric contacts are exposed on an upper surface of the probe head and the optical contacts are fixed to the probe head, and a transformer including connecting wires provided therein such that tip ends on one side of the connecting wires electrically connected to the proximal ends of the electric contacts exposed on the upper surface of the probe head are arranged in a lower surface of the transformer while the optical contacts slidably penetrate the transformer. A positional relationship between the tip end of the respective electric contacts and the tip end of the respective optical contacts on the lower surface of the probe head corresponds to a positional relationship between an electrical signal terminal and an optical signal terminal of a semiconductor device.
    Type: Grant
    Filed: April 3, 2020
    Date of Patent: February 13, 2024
    Assignee: Kabushiki Kaisha Nihon Micronics
    Inventor: Minoru Sato
  • Patent number: 11874511
    Abstract: [Problem] To allow to condense and guide the light emitted by a light emitting element having a large light emission surface to an optical connector, in inspection of a semiconductor integrated circuit. [Solution] The present disclosure provides a connecting apparatus used at the time of inspection of a semiconductor integrated circuit, and the connecting apparatus includes an electric connector electrically connecting to an electrode terminal of the semiconductor integrated circuit, an optical connector optically connecting to an optical terminal of the semiconductor integrated circuit, a connector support substrate configured to support the electric connector and the optical connector so that an end part of the electric connector and an end part of the optical connector respectively connect to the semiconductor integrated circuit, and a light condensing substrate configured to condense light emitted by an optical terminal of the semiconductor integrated circuit to the optical connector.
    Type: Grant
    Filed: January 25, 2022
    Date of Patent: January 16, 2024
    Assignee: KABUSHIKI KAISHA NIHON MICRONICS
    Inventors: Hiroshi Kamiya, Yuki Komai, Hisao Narita
  • Patent number: 11860190
    Abstract: It is possible to make the free length of a contactor uniform even when the contactor is joined to a position that deviates from a joint position in a high-frequency conducting path and make contact with an electrode with stability, which improves measurement quality. A probe unit according to the present disclosure includes: a coaxial connector that is attached to a main body and gives and receives an electrical signal to and from a tester via a coaxial cable; a high-frequency conducting path that is connected to the coaxial connector and transmits an electrical signal; a plurality of contactors, each having a tip portion that makes electrical contact with an electrode of an object to be inspected and giving and receiving an electrical signal to and from the high-frequency conducting path; and a pedestal that is interposed between the contactor and the high-frequency conducting path, and the pedestal is provided in each contactor such that a free length of the contactor is a predetermined length.
    Type: Grant
    Filed: April 27, 2022
    Date of Patent: January 2, 2024
    Assignee: KABUSHIKI KAISHA NIHON MICRONICS
    Inventors: Satoshi Narita, Shou Harako, Jukiya Fukushi
  • Patent number: 11828773
    Abstract: An electrical connecting device includes an insulating probe including a bottom-side plunger, a top-side plunger, and a barrel, and a probe head including a combined guide plate having a conductive region made of a conductive material and an insulating region made of an insulating material arranged adjacent to each other in a planar view. The bottom-side plunger and the top-side plunger are electrically connected to each other inside the barrel, and the bottom-side plunger and the top-side plunger are electrically insulated from the barrel. The probe head holds the insulating probe in a state in which the barrel penetrates through the conductive region. The barrel of the insulating probe is connected to a ground potential via the conductive region when an inspection object is measured.
    Type: Grant
    Filed: December 20, 2019
    Date of Patent: November 28, 2023
    Assignee: Kabushiki Kaisha Nihon Micronics
    Inventor: Akihiro Shuto
  • Patent number: 11762008
    Abstract: A connecting device for inspection includes a probe head configured to hold electric contacts and optical contacts such that tip ends of the respective contacts are exposed on a lower surface of the probe head, and a transformer including connecting wires arranged therein and optical wires penetrating therethrough. The respective proximal ends of the electric contacts and the optical contacts are exposed on an upper surface of the probe head, and tip ends on one side of the connecting wires electrically connected to the proximal ends of the electric contacts and connecting ends of the optical wires optically connected to the proximal ends of the optical contacts are arranged in a lower surface of the transformer.
    Type: Grant
    Filed: April 3, 2020
    Date of Patent: September 19, 2023
    Assignee: Kabushiki Kaisha Nihon Micronics
    Inventor: Minoru Sato
  • Patent number: 11747365
    Abstract: An object is to enhance the durability of substrates of a probe substrate and/or the probe substrate and a member to be joined.
    Type: Grant
    Filed: October 18, 2019
    Date of Patent: September 5, 2023
    Assignees: KABUSHIKI KAISHA NIHON MICRONICS, TANAKA KIKINZOKU KOGYO K.K.
    Inventors: Toshinori Omori, Kazuya Goto, Yasuaki Osanai, Takashi Akiniwa, Takeki Sugisawa, Takeshi Kondo, Shintaro Abe, Maki Watanabe
  • Patent number: 11709182
    Abstract: An electrical connecting device includes a probe head, and probes for measurement and probes for confirmation held by the probe head. The probe head holds the probes for measurement and the probes for confirmation in a state in which the respective tip ends are exposed therefrom. An exposed length from the probe head to the tip end is shorter for the probes for confirmation than for the probes for measurement.
    Type: Grant
    Filed: March 29, 2021
    Date of Patent: July 25, 2023
    Assignee: Kabushiki Kaisha Nihon Micronics
    Inventor: Shota Hetsugi
  • Patent number: 11624679
    Abstract: An optical probe receives an optical signal output from a test subject. The optical probe includes an optical waveguide composed of a core portion and a cladding portion disposed on an outer periphery of the core portion, wherein an incident surface of the optical waveguide, which receives the optical signal, is a convex spherical surface with a constant curvature radius.
    Type: Grant
    Filed: September 30, 2020
    Date of Patent: April 11, 2023
    Assignee: Kabushiki Kaisha Nihon Micronics
    Inventors: Michitaka Okuta, Yuki Saito, Toshinaga Takeya, Shou Harako, Jukiya Fukushi, Minoru Sato, Hisao Narita
  • Patent number: 11592402
    Abstract: A connecting device for inspection includes optical probes, and a probe head including a plurality of guide plates. The probe head includes a first guide plate, and a second guide plate arranged movably with respect to the first guide plate in a radial direction of the penetration holes in a state in which the optical probes are inserted to the respective penetration holes. The probe head holds the optical probes by inner wall surfaces of the penetration holes of the first guide plate and inner wall surfaces of the penetration holes of the second guide plate in a state in which the positions of the central axes of the penetration holes of the first guide plate are shifted in the radial direction from the positions of the central axes of the penetration holes of the second guide plate.
    Type: Grant
    Filed: August 2, 2021
    Date of Patent: February 28, 2023
    Assignee: Kabushiki Kaisha Nihon Micronics
    Inventor: Minoru Sato
  • Publication number: 20230003764
    Abstract: The present disclosure is an inspection apparatus that makes an inspection of electrical characteristics of an object to be inspected. using a contactor brought into electrical contact with an electrode of the object to be inspected, the inspection apparatus including: a position adjusting unit including the contactor, a position adjusting section that adjusts a tip position of the contactor, and a load. detecting section that detects a value of contact load between the contactor and the electrode; a position deriving section that derives an initial position of the contactor in a specific direction based on a relationship between an amount of contact displacement of the contactor in the specific direction and the value of contact load between the contactor and the electrode; and a movement performing section that moves the tip position of the contactor based on the initial position in the specific direction derived by the position deriving section.
    Type: Application
    Filed: May 25, 2022
    Publication date: January 5, 2023
    Applicant: KABUSHIKI KAISHA NIHON MICRONICS
    Inventors: SATOSHI NARITA, JUN SHIRATO
  • Publication number: 20220390489
    Abstract: It is possible to make the free length of a contactor uniform even when the contactor is joined to a position that deviates from a joint position in a high-frequency conducting path and make contact with an electrode with stability, which improves measurement quality. A probe unit according to the present disclosure includes: a coaxial connector that is attached to a main body and gives and receives an electrical signal to and from a tester via a coaxial cable; a high-frequency conducting path that is connected to the coaxial connector and transmits an electrical signal; a plurality of contactors, each having a tip portion that makes electrical contact with an electrode of an object to be inspected and giving and receiving an electrical signal to and from the high-frequency conducting path; and a pedestal that is interposed between the contactor and the high-frequency conducting path, and the pedestal is provided in each contactor such that a free length of the contactor is a predetermined length.
    Type: Application
    Filed: April 27, 2022
    Publication date: December 8, 2022
    Applicant: KABUSHIKI KAISHA NIHON MICRONICS
    Inventors: SATOSHI NARITA, SHOU HARAKO, JUKIYA FUKUSHI
  • Patent number: 11502472
    Abstract: To provide a method of manufacturing an electrical contactor including a volute spring structure extending in upward and downward directions formed integrally using a single material, having mechanical simplicity and excellent functionality, and functioning as an electric circuit achieving connection without loss.
    Type: Grant
    Filed: April 13, 2021
    Date of Patent: November 15, 2022
    Assignee: KABUSHIKI KAISHA NIHON MICRONICS
    Inventor: Tomoaki Kuga
  • Patent number: 11482805
    Abstract: Provided is an electrical contactor that is formed from a small number of components that can improve the conductivity in the electrical contactor, while improving the slidability of an elastic member and the electrical contact stability with a contact target.
    Type: Grant
    Filed: September 22, 2020
    Date of Patent: October 25, 2022
    Assignee: KABUSHIKI KAISHA NIHON MICRONICS
    Inventor: Tomoaki Kuga
  • Patent number: 11435392
    Abstract: An inspection method includes a step S20 of electrically connecting electrical signal terminals of a semiconductor device to electric connectors, and optically connecting optical signal terminals of the semiconductor device to optical connectors, a step S30 of measuring a test light output signal output from a monitoring element provided in an inspection object in response to a test input signal having been input to the monitoring element while adjusting conditions of a position and an inclination of the inspection object, and extracting conditions in which an optical intensity of the test light output signal is a predetermined determination value or greater as inspection conditions, and a step S40 of inspecting the semiconductor device under the inspection conditions.
    Type: Grant
    Filed: August 27, 2019
    Date of Patent: September 6, 2022
    Assignee: Kabushiki Kaisha Nihon Micronics
    Inventors: Osamu Arai, Hiroshi Kamiya
  • Patent number: 11428727
    Abstract: An object of the present invention is to provide a prober that is able to carry out accurate inspection of semiconductor device in wafer state by reducing the effect of the external noises and the leakage of current and further by eliminating the stray capacitance of the chuck stage against the prober housing.
    Type: Grant
    Filed: March 25, 2019
    Date of Patent: August 30, 2022
    Assignee: KABUSHIKI KAISHA NIHON MICRONICS
    Inventors: Katsuo Yasuta, Mamoru Aruga
  • Publication number: 20220260792
    Abstract: [Problem] To allow to condense and guide the light emitted by a light emitting element having a large light emission surface to an optical connector, in inspection of a semiconductor integrated circuit. [Solution] The present disclosure provides a connecting apparatus used at the time of inspection of a semiconductor integrated circuit, and the connecting apparatus includes an electric connector electrically connecting to an electrode terminal of the semiconductor integrated circuit, an optical connector optically connecting to an optical terminal of the semiconductor integrated circuit, a connector support substrate configured to support the electric connector and the optical connector so that an end part of the electric connector and an end part of the optical connector respectively connect to the semiconductor integrated circuit, and a light condensing substrate configured to condense light emitted by an optical terminal of the semiconductor integrated circuit to the optical connector.
    Type: Application
    Filed: January 25, 2022
    Publication date: August 18, 2022
    Applicant: KABUSHIKI KAISHA NIHON MICRONICS
    Inventors: HIROSHI KAMIYA, YUKI KOMAI, HISAO NARITA
  • Patent number: 11378591
    Abstract: An electrical connection device includes: a wiring board in which lands are arranged on a main surface; and probes. Each of the probes has a distal end portion that contacts an object to be measured and a proximal end portion that contacts the land. A material of a surface film of the proximal end portion, which contacts the land, is a metal material different in composition from a material of the land that contacts the surface film.
    Type: Grant
    Filed: November 5, 2020
    Date of Patent: July 5, 2022
    Assignee: Kabushiki Kaisha Nihon Micronics
    Inventors: Kenichi Tsuruta, Takayuki Hayashizaki, Koichiro Tokumaru, Miyuki Tomooka
  • Patent number: 11372022
    Abstract: An electrical contactor includes: an installing portion; a base end portion extending continuously toward the installing portion; a plurality of arm portions extending from the base end portion in a longitudinal direction; a coupling portion coupled to the tip of each of the arm portions; a pedestal portion provided continuously toward the coupling portion; and a contact portion provided at a lower end of the pedestal portion, wherein each of the plurality of arm portions elastically supports the contact portion in contact with a first contact target, and a curved portion is provided on the coupling portion side or the base end portion side of a closest-to-contact-portion arm portion that is the closest to the contact portion among the plurality of arm portions.
    Type: Grant
    Filed: July 28, 2020
    Date of Patent: June 28, 2022
    Assignee: KABUSHIKI KAISHA NIHON MICRONICS
    Inventors: Yasutaka Kishi, Masahiro Wakazawa
  • Patent number: 11340289
    Abstract: An electrical contactor capable of coping with an electrical test under a high temperature environment and realizing reliable positioning is provided.
    Type: Grant
    Filed: February 7, 2020
    Date of Patent: May 24, 2022
    Assignee: KABUSHIKI KAISHA NIHON MICRONICS
    Inventor: Eichi Osato
  • Publication number: 20220099702
    Abstract: An object is to enhance the durability of substrates of a probe substrate and/or the probe substrate and a member to be joined.
    Type: Application
    Filed: October 18, 2019
    Publication date: March 31, 2022
    Applicants: KABUSHIKI KAISHA NIHON MICRONICS, TANAKA KIKINZOKU KOGYO K.K.
    Inventors: TOSHINORI OMORI, KAZUYA GOTO, YASUAKI OSANAI, TAKASHI AKINIWA, TAKEKI SUGISAWA, TAKESHI KONDO, SHINTARO ABE, MAKI WATANABE