Abstract: In a chamber of a plasma processing apparatus, a cathode electrode and an anode electrode are disposed at a distance from each other. The cathode electrode is supplied with electric power from an electric power supply portion. The anode electrode is electrically grounded and a substrate is placed thereon. The anode electrode contains a heater. In an upper wall portion of the chamber, an exhaust port is provided and connected to a vacuum pump through an exhaust pipe. In a lower wall portion of a wall surface of the chamber, a gas introduction port is provided. A gas supply portion is provided outside the chamber.

Abstract: An electronic calculator includes a mode selection key and a memo mode selection key. The mode selection key is actuated to select a memo mode for inputting and printing out memo data and a calculation mode for operating arithmetic calculation. The memo mode selection key is actuated to absolutely select the memo mode during the calculation mode. Once the memo mode selection key is actuated and a print key is actuated to print out the memo data, the calculation mode is reselected, automatically, so that the calculator can continue to calculate.