Patents Assigned to Kabushiki Kaisha Ultraclean Technology Reserach Institute
  • Cleaning method
    Patent number: 6416586
    Abstract: The present invention has as an object thereof to provide a cleaning method which realizes, in the cleaning process, (1) a reduction in the number of processes, (2) a simplification of the cleaning apparatus, and (3) a reduction in the amount of chemicals and pure water employed, and which has highly superior cleaning effects and does not damage the substrate body, as well as to provide a rinsing method which aids in the hydrogen termination of silicon atoms.
    Type: Grant
    Filed: November 29, 1999
    Date of Patent: July 9, 2002
    Assignees: Kabushiki Kaisha Ultraclean Technology Reserach Institute
    Inventors: Tadahiro Ohmi, Toshihiro Il, Kenji Mori, Toshikazu Abe, Hirosi Arakawa, Takahisa Nitta