Abstract: The present invention provides a lid unit for closing a container body used to transport thin-plates such as semiconductor wafers or the like accommodated therein. Simplified attaching/detaching mechanisms are provided at the centers of the respective sides of the lid unit. The attaching/detaching mechanism includes a locking plate, for locking within a second recess, a lid receiving portion of the container body and a drive-out member for raising and locking the locking plate. A locking arm for fixing the drive-out member is provided on its leading side in the direction of engaging rotation. A supporting rail for guiding the raising and locking/unlocking movement of the locking plate is provided on the drive-out member. The locking plate is mounted for pivoting and sliding movement, and is provided with a holding claw for engagement within a second recess at the distal end thereof.

Abstract: Disclosed is a thin-plate accommodating/transporting container including a container body for accomodating and supporting a plurality of thin plates while keeping the interior of the container clean, comprising: positioning means, provided at the container body, for accurately adjusting a placement position of the container body; lid receiving portion which is provided in the container body and to which the lid is attached; and engagement means, provided at the lid receiving portion, for engaging with various types of lids of different attachment methods.

Abstract: The present invention relates to a thin-plate supporting container 1 having a container body 2, and a thin-plate supporting unit 3 for supporting the semiconductor wafers from both sides thereof in the container body. There are provided a lid 4, and an easy attach/detach mechanism for attaching and detaching the lid 4. The easy attach/detach mechanism 31 is composed of a lid engaging claw 32 provided on the circumference of the lid 4, and object engagement part 28, provided on the container body 2, for engaging with the lid engagement claw 32 so as to secure the lid 4 to the container body 2, an arm 34 for releasing the lid engagement claw 32 from the object engagement part 28; and an elevating mechanism for slightly elevating the lid 4 from the container body 2 when the lid engagement claw 32 is released by means of the arm 34. The thin-plate supporting unit 3, the top flange 5, the carrying handle 6 are detachably mounted. The thin-plate supporting unit 3 is formed with a V-shaped groove 38.

Abstract: A container for a plurality of thin plates has a driving unit for moving one of a pair of magnetic members, at least one of which is a magnet, embedded in a container body and contained in a chamber in a lid, respectively, to selectively produce attractive and non-attractive magnetic conditions between the first and second magnetic members. In one embodiment, the driving unit includes a rotatable plate, and an arm having one end attached to the rotatable plate and the second end attached to the movable magnetic member to move the movable magnetic member in response to rotation of the rotatable plate. In a second embodiment a parallel movement link has a long groove for engaging a pin provided on the rotatable plate; a magnetic member supporting link has a first end attached to one end of the parallel movement link and has its second end attached to the movable magnetic member.

Abstract: A carrier box serving as a thin-plate supporting container includes a container body for defining therein a chamber for supporting and housing therein a plurality of semiconductor wafers and a lid for covering the container body. In one embodiment, the carrier box includes an internal-pressure adjusting mechanism for maintaining the internal pressure in the chamber at the same level as that of the external pressure against the chamber. The internal-pressure adjusting mechanism is composed of an opening formed in a wall of the container body and a filter detachably mounted in the opening for removing foreign matters while allowing gas to easily enter and exit the chamber so as to maintain the chamber in a clean state. In another embodiment, the carrier box includes a gasket made of a porous material.

Abstract: An easily attachable/detachable lid mounted container includes a container body, a lid for covering the container body, and an easy attach/detach mechanism for reliably securing the lid to the container body and for easily detaching the lid from the container body. The easy attach/detach mechanism includes: an engagement plate provided on the lid and extending toward the container body, the engagement plate being resilient and bendable; an object engagement portion, provided on the container body, for engaging, when the lid is pressed toward the container body, with the engagement plate so as to secure the lid to the container body; and separation means, provided between the engagement plate and the object engagement portion, for separating the engagement plate from the object engagement portion when the separation means is pressed toward the container body.

Abstract: A carrier box serving as a thin-plate supporting container includes a container body for defining therein a chamber for supporting and housing therein a plurality of semiconductor wafers and a lid for covering the container body. In one embodiment, the carrier box includes an internal-pressure adjusting mechanism for maintaining the internal pressure in the chamber at the same level as that of the external pressure against the chamber. The internal-pressure adjusting mechanism is composed of an opening formed in a wall of the container body or the like, and a filter detachably mounted in the opening for removing foreign matters while allowing gas to easily enter and exit said chamber so as to maintain the chamber in a clean state. In another embodiment, the carrier box includes a gasket made of a porous material or the like.

Abstract: A carrier box serving as a thin-plate supporting container includes a container body for defining therein a chamber for supporting and housing therein a plurality of semiconductor wafers and a lid for covering the container body. In one embodiment, the carrier box includes an internal-pressure adjusting mechanism for maintaining the internal pressure in the chamber at the same level as that of the external pressure against the chamber. The internal-pressure adjusting mechanism is composed of an opening formed in a wall of the container body or the like, and a filter detachably mounted in the opening for removing foreign matters while allowing gas to easily enter and exit the chamber so as to maintain the chamber in a clean state. In another embodiment, the carrier box includes a gasket made of a porous material or the like.

Abstract: A thin-plate supporting container provided with supporting rib portions, each of which consists of multi-stage ribs, for supporting thin plates respectively on multiple stages at regular intervals. The ribs are provided in parallel on each of opposing side walls of the container casing in such a way that the supporting rib portions cooperate to hold the thin plates. An open end of the thin-plate supporting container serves as an inlet/outlet port, through which the thin plates are loaded and unloaded from the container. Each of the supporting rib portions is composed of an inlet portion adjacent the inlet/outlet-port and a support portion interior thereof. Further, the opening between opposed side surfaces of adjacent ribs is set to be sufficiently large that the thin plate can be easily loaded and unloaded.

Abstract: A thin-plate supporting container provided with supporting rib portions, each of which consists of multi-stage rib pieces, for supporting thin plates respectively on multiple stages at regular intervals. The supporting rib portions are provided on each of side walls of a casing of the container in parallel in such a way that each of the supporting rib portions provided on one of the side walls and a corresponding one of the supporting rib portions provided on the other of the side walls face each other and sandwich the thin plate. An opening portion of the thin-plate supporting container is an inlet/outlet port, through which the thin plate is loaded or unloaded from the container. Each of the supporting rib portions is composed of an inlet portion placed at the inlet/outlet-port-side thereof and a matching portion placed at an inner part thereof.

Abstract: A thin-plate supporting container provided with supporting rib portions, each of which consists of multi-stage ribs, for supporting thin plates respectively on multiple stages at regular intervals. The ribs are provided in parallel on each of opposing side walls of the container casing in such a way that the supporting rib portions cooperate to hold the thin plates. An open end of the thin-plate supporting container serves as an inlet/outlet port, through which the thin plates are loaded and unloaded from the container. Each of the supporting rib portions is composed of an inlet portion adjacent the inlet/outlet-port and a support portion interior thereof. Further, the opening between opposed side surfaces of adjacent ribs is set to be sufficiently large that the thin plate can be easily loaded and unloaded.

Abstract: A resin-made detachable fitting to which a tube is connected. The fitting comprises a core of a cylindrical or ring shape forcibly inserted into the tube end to expand it, a fitting body having an inner passage, and a box nut able to mesh with ends of the fitting body and connecting the tube end to the fitting body. The fitting body comprises a cylindrical socket portion axially cylindrically extending from the fitting body ends and having an outer diameter equal to the inner diameter of the core. The socket portion has a sealing surface at its end. The fitting body further comprises a cylindrical securing portion axially extending from the fitting body ends and formed coaxially around the socket portion to form an insertions space. The securing portion has a securing wall facing the socket portion and holding, together with the socket portion, the tube inserted into the insertion space. The box nut comprises a holding surface facing the sealing surface.