Abstract: There is disclosed a container which conveys a semiconductor wafer and in which the face of the wafer is chemically treated. The container comprises a receiving platelike member and a cover made from a transparent or semitransparent plastic. The platelike member is made from a hydrophobic plastic such as a fluorocarbon resin and provides a quite small area in contact with the sample of the wafer to support it. Tonguelike portions extend steeply upwardly around the sample. When the cover is closed, the tonguelike portions are thrown toward the center of the container, bent, and pressed against the side surface of the sample. The container locks the sample without making contact with the face of the sample. The top cover is fitted over the platelike member to maintain the airtightness. To assure the airtightness, the container is equipped with an O ring and a tightening implement.

Abstract: An inner surface of each of the side walls of a basket for processing thins plates is provided with plural rod-like projections extending inwardly in opposite directions to each other acting as a space holding member, a plurality of these rod-like projections are arranged in spaced apart relation along an inserting direction of the thin plates so as to form a group of rod-like projections, the groups of rod-like projections are arranged in side-by-side relation with a specified pitch for every spacing of the spaced-apart thin plates, the thin plates are inserted between adjoining groups of rod-like projections, thereby a flowing communication of the processing liquid or air is further improved as compared with the space holding member made by the continuous partition wall of the prior art, resulting in that an etching process or a centrifugal drying for the stored thin plates can be performed efficiently.