Abstract: The object of the invention is to provide an automatic module and cassette station detecting and aligning semiconductor wafer/substrate material handling unit with a thermal processing chamber module having an integrated, sturdy, chemical and temperature resistant wafer lift pins and door actuation apparatus. One of the benefits that is derived from this apparatus is the ability to quickly and easily attach various processing modules at any docking position of the semiconductor wafer/substrate material handling unit (hereinafter MHU). The MHU of this apparatus has the additional benefit of a cassette station that automatically aligns and detects a plurality of different size and shape semiconductor wafer/substrate cassettes. The semiconductor wafer/substrate cassettes may also be functionally attached to a module that is docked to the MHU for use.

Abstract: Disclosed is an apparatus and method for modifying standard semiconductor wafer tranfer apparatus and method to permit the standard semiconductor wafer transfer apparatus and method to function with wafers that are extremely thin and flexible and are warped sufficiently out of planar configuration that it is impossible to establish a sufficient vacuum between the lower surface of the wafer and the upper surface of the transfer instrumentality. A positive gaseous medium pressure is applied to the upper surface of the wafer around the periphery thereof to cause those areas that are flexed upwardly to flex downwardly and contact the upper surface of the transfer instrumentality so that a sufficient vacuum can be established between the lower surface of the wafer and the upper surface of the transfer instrumentality to cause the wafer to be firmly secured to the transfer instrumentality to be transferred thereby from one location to another.

Abstract: A proximity mask alignment system includes a remotely-focusing microscope and a video frame storage device. When a first surface, such as an integrated circuit substrate, is in focus an image of the first surface is obtained and stored. Then, after the microscope is re-focused to a second surface, such as a photomask, the stored image of the first surface is superimposed onto the "live" image of the second surface. The two focal positions are stored, with a selected one being normally provided to the microscope. A user initiates an automatic sequence wherein the microscope focuses to the other focal position, stores an image obtained at the other focal position, then refocuses to the original focal position. The stored image is superimposed on the image currently being generated, enabling the user to simultaneous view each surface in sharp focus, facilitating the alignment of the two surfaces to one another.

Abstract: Apparatus and method for collision avoidance in a multinode data communications bus, the bus having a plurality of nodes coupled thereto for transmitting and receiving data over the bus, the bus further including a BUS BUSY signal line bidirectionally connected in common between the nodes, each of the nodes being operable for asserting the BUS BUSY signal line and also for determining the state of the BUS BUSY signal line.