Patents Assigned to Karl Suss KG, Prazisionsgerate fur Wissenschaft und Industrie GmbH & Co.
  • Alignment patterns for two objects to be aligned relative to each other
    Patent number: 5172190
    Abstract: The invention relates to alignment marks for a process for aligning two objects relative to each other by means of an image recognition system wherein the lines are optoelectronically scanned and the obtained brightness values are integrated line-by-line. The advantages of the alignment marks according to the invention reside in that position inaccuracies due to the mutual optical influence of the alignment marks in the optoelectronic evaluation are avoided and furthermore in a high evaluation speed.
    Type: Grant
    Filed: January 11, 1991
    Date of Patent: December 15, 1992
    Assignee: Karl Suss KG Prazisionsgerate fur Wissenschaft und Industrie - GmbH & Co.
    Inventor: Paul Kaiser
  • Device for the automatic focussing of optical instruments with complementary measuring and detecting diaphragms
    Patent number: 4686360
    Abstract: For the automatic focussing of an optical instrument on an object, a measng diaphragm is inserted into the illuminating radiation path, which diaphragm is to be projected onto the object plane and focus plane during focussing. This intermediate image of the measuring diaphragm is projected via a detector diaphragm which is complementary to the measuring diaphragm, onto a detector, the output signal of which is a scale for the quality of the focussing and which acts on a focussing drive in the sense of optimum focussing via a control device.
    Type: Grant
    Filed: October 31, 1984
    Date of Patent: August 11, 1987
    Assignee: Karl Suss KG, Prazisionsgerate fur Wissenschaft und Industrie GmbH & Co.
    Inventor: Georg Gorgon