Patents Assigned to Kashiwara Machine Mfg. Co., Ltd.
  • Patent number: 7648409
    Abstract: A method of polishing the double sides of a plurality of works simultaneously by rotating a plurality of carriers between upper and lower rotating surface plates, comprising the steps of forming the works (400) integrally with the carriers (500) on the outside of a polishing device main body (110), feeding the works (400) onto a rotating surface plate (111) on the underside of the polishing device main body (110) with the works formed integrally with the carriers (500), injecting liquid such as water from the upper side rotating surface plate when the upper side rotating surface plate is raised after the double sides are polished, holding the plurality of works (400) on the lower side rotating surface plate (111) after the double sides are polished, enabling the works (400) to be discharged automatically from the lower side rotating surface plate (111), providing a brush storage part (180) and a dresser storage part (190) near the polishing device main body (110), and frequently treating a polishing cloth ins
    Type: Grant
    Filed: May 17, 2000
    Date of Patent: January 19, 2010
    Assignees: Sumitomo Mitsubishi Silicon Corporation, Kashiwara Machine Mfg. Co., Ltd.
    Inventors: Akira Horiguchi, Ken Isobe, Heigo Tanaka, Tomio Fukushima, Kiyohide Murata, Tsunco Takeda, Yoshiaki Uzu, Hiroshi Matsumoto
  • Patent number: 7029380
    Abstract: In order to improve a flatness of a work in single wafer type double-side polishing in which one wafer is polished with one carrier, a carrier larger in diameter than upper and lower surface plates that rotate is inserted between the surface plates, and a wafer smaller in diameter than the surface plates is held with the carrier. The carrier is rotated by plural eccentric gears that mesh with external gear teeth formed on the outer peripheral surface of the carrier at plural positions along a circumferential direction thereof and revolve around positions spaced from the centers as centers in synchronism with each other or one another at the plural positions of meshing. The carrier rotates about its center and moves circularly around the center of the surface plates spaced from the center thereof. The upper surface plate is reciprocated in a direction perpendicular to the central axis when required.
    Type: Grant
    Filed: December 20, 2004
    Date of Patent: April 18, 2006
    Assignees: Kashiwara Machine Mfg. Co., Ltd., Sumitomo Mitsubishi Silicon Corporation
    Inventors: Akira Horiguchi, Shoji Nakao
  • Publication number: 20050159089
    Abstract: In order to improve a flatness of a work in single wafer type double-side polishing in which one wafer is polished with one carrier, a carrier larger in diameter than upper and lower surface plates that rotate is inserted between the surface plates, and a wafer smaller in diameter than the surface plates is held with the carrier. The carrier is rotated by plural eccentric gears that mesh with external gear teeth formed on the outer peripheral surface of the carrier at plural positions along a circumferential direction thereof and revolve around positions spaced from the centers as centers in synchronism with each other or one another at the plural positions of meshing. The carrier rotates about its center and moves circularly around the center of the surface plates spaced from the center thereof. The upper surface plate is reciprocated in a direction perpendicular to the central axis when required.
    Type: Application
    Filed: December 20, 2004
    Publication date: July 21, 2005
    Applicants: Kashiwara Machine Mfg. Co., Ltd., Sumitomo Mitsubishi Silicon Corporation
    Inventors: Akira Horiguchi, Shoji Nakao
  • Patent number: 5134910
    Abstract: A method of simultaneously cutting the surfaces of a set of a plurality of rolls made flush with one plane, disposed at equal angular intervals, and forming a central caliber therebetween, by means of a cutter provided with cutting tools in the same number as that of the rolls. The cutter holds the cutting edge of the cutting tool in parallel with the cutter shaft and adapts the cutting edge to face the just front side of one of the rolls for the purpose of cutting. In cutting, in addition to the movement of the cutter in the axial direction Z and circumferential direction .theta., the cutting tool moves in the radial direction R of the cutter shaft. Thus, the cutting edge 21a' is kept facing the roll shaft at right angles all the time in spite of positional change in the circumferential direction .theta., whereby simultaneous and continuous shaping of not only the caliber surface but also round parts 10b on both sides of the shoulder and 120.degree. surface is made possible.
    Type: Grant
    Filed: March 13, 1990
    Date of Patent: August 4, 1992
    Assignee: Kashiwara Machine Mfg. Co., Ltd.
    Inventors: Hidenobu Morikuni, Mamoru Nishioka, Hiroshi Matsumoto, Kenji Fujihara