Abstract: An abatement system with liquid-ring pump maintains an exhaust line at a negative pressure during operation of a vacuum pump. The vacuum pump operates to exhaust process gas and by-products from a process chamber through a foreline. The vacuum pump exhausts the process gas to the abatement system with liquid-ring pump through the exhaust line. The overall life of the vacuum pump is increased significantly because the exhaust line is maintained at a negative pressure which reduces precipitation of gases in the vacuum pump thereby reducing by-product accumulation and damage to the vacuum pump. The liquid-ring pump receives the exhaust process gas from the vacuum pump and outputs gas to a burn chamber and liquid to a recirculation tank. Liquid is recycled through the liquid-ring pump thereby reducing accumulation of precipitated gas and by-product. The overall life of the liquid-ring pump and vacuum pump are increased.

Abstract: Disclosed is a vane compressor in which cylinders concentrically formed at the side of a rotor are eccentrically inserted in ring-shaped spaces between cylindrical parts concentrically formed at the side of a stator. A pair of radially extending vane attachment grooves is formed in the rotor, and vanes are slidably attached in the vane attachment grooves. Compression chambers the volumes of which repeatedly increase and decrease with each rotation of the rotor are concentrically formed in multiple stages by the cylindrical parts of the stator, the cylinders of the rotor, and comb-tooth parts of the vanes. It is possible to realize a vane compressor in which compression chambers can be concentrically arranged in multiple stages in a simple structure by suppressing increase in the number of components to the minimum level.

Abstract: Disclosed is a vane compressor in which cylinders concentrically formed at the side of a rotor are eccentrically inserted in ring-shaped spaces between cylindrical parts concentrically formed at the side of a stator. A pair of radially extending vane attachment grooves is formed in the rotor, and vanes are slidably attached in the vane attachment grooves. Compression chambers the volumes of which repeatedly increase and decrease with each rotation of the rotor are concentrically formed in multiple stages by the cylindrical parts of the stator, the cylinders of the rotor, and comb-tooth parts of the vanes. It is possible to realize a vane compressor in which compression chambers can be concentrically arranged in multiple stages in a simple structure by suppressing increase in the number of components to the minimum level.

Abstract: The invention reduces power consumption and makes a rotor with ease. As illustrated in FIG. 2, a multistage roots pump (1) in the invention includes upstream rotors (R1a, R1b, R2a, R2b) having multiple teeth, supported by a pair of revolving shafts (A1, A2); and downstream rotors (R3a, R3b-R5a, R5b) having an identical number of teeth (31) with the upstream rotors, supported by revolving shafts (A1, A2). The discharge area formed by the outer periphery of the downstream rotors (R3a, R3b-R5a, R5b) and the inner periphewy of the pump chambers (P1-P5) is smaller than that of the upstream rotors (R1a, R1b, R2a, R2b).

Abstract: The invention reduces power consumption and makes rotor with ease. As illustrated in FIG. 2, a multistage roots pump (1) in the invention including upstream rotors (R1a, R1b, R2a, R2b) having multiple teeth, supported by a pair of revolving shafts (A1, A2); and downstream rotors (R3a, R3b˜R5a, R5b) having identical number of teeth (31) with the upstream rotors, supported by revolving shafts (A1, A2). The discharge area formed by the outer periphery of the downstream rotors (R3a, R3b˜R5a, R5b) and the inner periphery of the pump chambers (P1˜P5) is smaller than that of the upstream rotors (R1a, R1b, R2a, R2b).

Abstract: The invention provides a low-cost screw rotor that is capable of compressing gas. As exemplified in FIG. 4, screw rotors (26, 27) comprise: upstream screw section (43a) defined on the upstream side of the gas travel path with screw thread (41a) identically positioned at the same interval, and downstream screw section (43b) connecting to the downstream side of upstream screw section (43a) along the gas travel path, where threads (41b) on the downstream screw section are arranged continuously with identical pitch smaller than threads (41a) on the upstream screw section; and the upstream end of the downstream screw thread (41b) along the gas travel path and the downstream end of upstream screw thread (41a) along the gas travel path are continuously connected at a yielding point (43c).