Abstract: A fast and smooth scanning is described for achieving uniform ablated surface without relying on any synchronization between the laser pulses and the scanner mirror positions. The scanning takes a series of close loops and the scanning speed on each loop is fine-tuned according to the perimeter of the loop. A uniform and close-packed pulse disposition along each loop can be achieved by multiple successive scans along the loop, while the consecutive pulses of a scan can be well separated. The scanning pattern is such designed that the energy distribution is uniform for every layer and the smoothness of the ablated surface remains substantially unchanged as the number of the layer increases.
Type:
Application
Filed:
May 16, 2001
Publication date:
September 13, 2001
Applicant:
Katana Technologies GmbH, a German Corporation