Abstract: An optical measuring light path formed by a vacuum-side laser beam (Pa) as a reference standard and an optical measuring light path formed by a gas-side laser beam (Pb) as a dimension to be measured are coaxially located sandwiching a movable end (optical transparent body 12) of a vacuum container (11) in order to satisfy Abbe's principle requiring linear disposition of the reference standard and the dimension to be measured in measurement direction, thereby reducing measurement error in measuring air refractive index and improving measurement accuracy therefor.
Type:
Grant
Filed:
March 27, 2001
Date of Patent:
May 6, 2003
Assignees:
Kazumasa Kusaka, Director General of National Institute of
Advanced Industrial Science and Technology, Ministry of Economy,
Trade and Industry, Mitutoyo Corporation
Inventors:
Jun Ishikawa, Morimasa Ueda, Hiroki Masuda, Yutaka Kuriyama
Abstract: An optical measuring light path formed by a vacuum-side laser beam (Pa) as a reference standard and an optical measuring light path formed by a gas-side laser beam (Pb) as a dimension to be measured are coaxially located sandwiching a movable end (optical transparent body 12) of a vacuum container (11) in order to satisfy Abbe's principle requiring linear disposition of the reference standard and the dimension to be measured in measurement direction, thereby reducing measurement error in measuring air refractive index and improving measurement accuracy therefor.
Type:
Application
Filed:
March 27, 2001
Publication date:
November 22, 2001
Applicant:
KAZUMASA KUSAKA, DIRECTOR GENERAL OF NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND
Inventors:
Jun Ishikawa, Morimasa Ueda, Hiroki Masuda, Yutaka Kuriyama