Abstract: A gas supply system includes a cabinet forming an internal space where a gas container is disposed, a fastening device movably installed in the internal space and fastened to a valve of the gas container in a state of being aligned with the valve, and a mobile robot device movable outside the cabinet, detachably connected to the fastening device, and configured to move the fastening device in a state of being connected to the fastening device.

Abstract: Provided is a method of remotely controlling gas supply equipment, the method including: checking an operation allowance condition of a first operation of the gas supply equipment using a remote control server; checking a remote control authority using the remote control server, checking whether performance of the first operation is possible; controlling the gas supply equipment to perform the first operation; and initializing a received signal using the remote control server.

Abstract: A gas supply system is provided. The gas supply system includes a supply line configured to connect a gas container to a process object, a purge line connected to a first point of the supply line and connected to a purge gas supply portion configured to supply a purge gas, a first exhaust line connected to a second point of the supply line and connecting the supply line to an exhaust portion configured to apply negative pressure, and a second exhaust line connected to a third point of the purge line and connecting the purge line to a fourth point of the first exhaust line. The first point of the supply line is closer to the gas container than the second point is.

Abstract: A gas supply system includes a cabinet forming an internal space where a gas container is disposed, a fastening device movably installed in the internal space and fastened to a valve of the gas container in a state of being aligned with the valve, and a mobile robot device movable outside the cabinet, detachably connected to the fastening device, and configured to move the fastening device in a state of being connected to the fastening device.

Abstract: A gas supply system includes a cabinet in which a gas container is disposed, a fastening device movable with respect to the gas container, and fastenable to a valve of the gas container while aligned with the valve, a mobile robot device detachably connected to the fastening device and configured to move the fastening device, a three-dimensional (3D) vision camera configured to collect an image, and a processor configured to control an operation of the mobile robot device based on the image collected by the 3D vision camera.

Abstract: A gas supply system includes a cabinet, a fastening device fastenable a valve of a gas container while aligned with the gas container, a mobile robot device detachably connected to the fastening device and configured to move and operate the fastening device. The mobile robot device includes a body, a first collaborative robot disposed on the body, a second collaborative robot disposed on the body, a three-dimensional (3D) vision camera configured to collect an image, and a controller configured to control an operation of the first collaborative robot and an operation of the second collaborative robot based on the collected image.