Abstract: An inspection system is provided that can calculate highly accurate data for inspection having a high S/N ratio with high freedom. In order to attain this, an imaging timing is adjusted to synchronize a time for a projected image of an object to move by “m” pixels (“m” is an integer number greater than or equal to 1) in the X-axis direction on imaging elements, with an imaging time interval, and partial image data imaged at the identical inspection position on the object is specified from each unit of two-dimensional image data based on the object appearing deviated by “m” pixels in the X-axis direction in each unit of the two-dimensional image data imaged at each of the imaging timings, and data for inspection in which a noise reducing processing is conducted at the inspection position is produced based on each section of the partial image data.

Abstract: An object of the present invention is to apply a phase shift method to a workpiece having a rough surface to accurately detect an abnormal concave-convex irregularity. Therefore, in an inspecting system of the present invention, an image of a stripe pattern reflected on an inspection target surface is detected at a shallow angle, and one or more continuous unit stripes of a unit stripes reflected image is specified among the stripe pattern reflected images existing in a predetermined distance range counted from the edge in a closer side to the workpiece. Then, the phase of the specified unit stripes reflected image is varied to apply a phase shift method and scan the inspection target surface with the unit stripes reflected image to thereby detect the abnormal concave-convex irregularity.

Abstract: To provide estimating apparatus and method of the optical distortion of light transmitted through a transparent plate-shaped body. Upon picking-up a grid pattern via a glass plate by an image pickup device, 4n±? CCD pixels correspond to n grids (pair of a bright portion and a dark portion), thereby generating ? moire fringes. Sine waves with a phase A and sine waves with a phase B deviated from the phase A by 90° are generated based on gray data of the picked-up image in this state. A phase angle at each pixel on the Lissajous figure is calculated based on the sine waves with the phases A and B, and the refractive power is calculated based on a phase angular speed, serving as the difference between the phase angles of the pixels.