Patents Assigned to KDF Electronic + Vacuum Services Inc
  • Linear sweeping magnetron sputtering cathode and scanning in-line system for arc-free reactive deposition and high target utilization
    Patent number: 7101466
    Abstract: A sweeping linear magnetron is described. The magnetron has a cathode backing plate, a drive housing attached to the cathode backing plate and a motor held in the drive housing. The motor drives a yoke positioned within a cut-out in the backing plate. The yoke has a magnet pack attached thereto said yoke such that the magnet pack is adapted to being moved over a target material and wherein the target material is being sputtered within a vacuum chamber onto a substrate.
    Type: Grant
    Filed: September 19, 2003
    Date of Patent: September 5, 2006
    Assignee: KDF Electronic + Vacuum Services Inc
    Inventors: Subhadra Gupta, Andrew Ruspini