Abstract: Embodiments of a high-speed rotatable workpiece abrasive polishing head are disclosed that allow flat surfaced hard material workpieces or sapphire or semiconductor wafers to be polished at high abrading speeds that can use water-mist cooled quick-change fixed abrasive island-type discs. Workpieces can be quickly attached with vacuum to a rotatable workpiece plate having a curved (e.g., spherical) bearing with an offset spherical center of rotation located at the workpiece abraded surface. Abrading contact there prevents lateral abrading friction forces from tilting workpieces and causing non-flat workpiece surfaces. The workpiece carrier plate can be rotationally driven by a floating drive shaft having a spherical spline head that contacts the workpiece carrier plate at a position close to the workpiece abraded surface to avoid tilting of the workpiece due to the shaft-applied workpiece rotation forces.

Abstract: Abrasive sheet materials, abrasive sheet materials with island distributions of abrasive particles, processes for manufacture of abrasive sheet materials with minimized abrasive content (with monolayers and as few as four layers of abrasive particles), processes for using the abrasive sheeting in high speed lapping/abrading processes, and apparatus for using the abrasive sheeting are described. The process for manufacturing the abrasive sheeting provides an economical method for providing improved quality sheeting, while also allowing for greater control over the shape and distribution of abrasive islands on the sheet than is available from present processes of manufacture.

Abstract: A movable shaft with fluid bearing low friction support for the movable shaft comprises a housing, where the housing contains a shaft, at least one fluid bearing adjacent a surface of the shaft, a source of fluid at a pressure of at least 16.7 psi into the at least one fluid bearing, at least one vent for carrying fluid from the shaft to a reduced pressure area, and at least one fluid pressure chamber at one end of the shaft. The fluid pressure chamber providing fluid pressure that provides a force along an axial direction of the shaft to move the shaft axially.

Abstract: Lapping or polishing at high speeds with fine abrasive particles offer significant advantages in the speed of lapping, savings of time in lapping, and smoothness in the finished articles. An improved lapping system comprises a lapper platen system comprising: a) a frame (e.g., having a total weight of at least 200 kg) supporting a work piece holder b) a rotatable platen having an abrasive surface comprising an abrasive sheet secured to said platen, said platen being capable of providing surface feet per minute speeds on in outer edge of at least about 1,500 surface feet per minute; and c) a work piece holder which is movable on said frame.

Abstract: Lapping or polishing at high speeds with fine abrasive particles offer significant advantages in the speed of lapping, savings of time in lapping, and smoothness in the finished articles.

Abstract: A process for lapping a surface and providing a very smooth surface in short periods of time comprises:a) providing a work piece to be lapped, having at least one surface to be lapped,b) providing a rotating platen havingi) a back surface andii) a flat surface which can be adjusted to a position parallel to said at least one surface of said work piece,c) providing a sheet of abrasive material having an abrasive face and a back side, said back side being on said flat surface of said platen with the abrasive face of said sheet facing said at least one surface to be lapped,d) securing said sheet of abrasive material to said flat surface of said platen,e) rotating said platen at a rotational speed of at least 500 revolutions per minute, and a surface speed at an outside edge of said sheet of abrasive material of at least 1500 surface feet per minute, andf) contacting said abrasive face and said at least one surface of said workpiece to be lapped.

Abstract: Lapping or polishing at high speeds with fine abrasive particles offer significant advantages in the speed of lapping, savings of time in lapping, and smoothness in the finished articles.

Abstract: Lapping or polishing at high speeds with fine abrasive particles offer significant advantages in the speed of lapping, savings of time in lapping, and smoothness in the finished articles. An improved lapping system comprises a lapper platen system comprising:a) a frame having a total weight of at least 200 kg supporting a work piece holderb) a rotatable platen having an abrasive surface comprising an abrasive sheet secured to said platen;c) a work piece holder which is movable on said frame;d) a means for introducing a first amount of liquid onto said abrasive surface of said platen at a location before contact between a work piece held on said work piece holder and said abrasive surface on said platen;e) a means for introducing a second amount of liquid onto said abrasive surface of said platen after contact between said work piece and said abrasive surface; andf) means for directing air against said abrasive surface after introduction of said second amount of liquid.

Abstract: An improved process for lapping a surface according to the present invention comprises:a) providing a work piece with two surfaces to be lapped,b) providing two rotatable platens, each having i) a back surface and ii) a front surface,c) providing a sheet of abrasive material having an abrasive face and a back side, the back side being on the front surface of each of the two rotatable platens with the abrasive faces of each sheet facing the other sheet,d) placing the work piece with two surfaces to be lapped between the two rotatable platens, so that each abrasive face faces only one of the two surfaces to be lapped,e) rotating the two platens at a rotational speed of at least 500 revolutions per minute,f) contacting each of the abrasive faces with the only one of the two surfaces to be lapped, andg) lapping said two surfaces of said work piece simultaneously.

Abstract: Lapping or polishing at high speeds with fine abrasive particles offers significant advantages in the speed of lapping, savings of time in lapping, and smoothness in the finished articles. An improved lapping system comprises a lapper platen system comprising a rotatable platen having I) a back surface and ii) a front surface, wherein the front surface of the rotating platen facing a work piece has a flat plateau or raised area which is continuous around a perimeter of the front side of said platen and the plateau is elevated with respect to a central area on the front surface. The front surface optionally has vents for air, the platen optionally has a back side to which a shaft is connected (directly or through intermediate connections) to rotate the platen and there is a front side on the platen to which is secured an abrasive sheet by reduced air pressure conveyed through said vents.