Patents Assigned to Kenji Honda
  • NON-CORROSIVE CLEANING COMPOSITION FOR REMOVING PLASMA ETCHING RESIDUES
    Publication number: 20010001785
    Abstract: A non-corrosive cleaning composition for removing residues from a substrate. The composition comprises: (a) water; (b) at least one hydroxylammonium compound; (c) at least one basic compound, preferably selected from the group consisting of amines and quaternary ammonium hydroxides; (d) at least one organic carboxylic acid; and (e) optionally, a polyhydric compound. The pH of the composition is preferably between about 2 to about 6.
    Type: Application
    Filed: November 15, 1999
    Publication date: May 24, 2001
    Applicant: Kenji Honda
    Inventors: KENJI HONDA, MICHELLE ELDERKIN, VINCENT LEON