Patents Assigned to KENOSISTEC S.R.L.
  • Patent number: 11387086
    Abstract: A machine for the deposition of material on a substrate by the cathodic sputtering technique is provided, of the type provided with a cathode assembly having a tubular support extending substantially along a first axis (A), and a plurality of magnetic elements constrained to the tubular support and spaced from one another along the first axis (A), and wherein each of the magnetic elements has at least one second axis (M) of magnetic orientation, linking the respective magnetic poles (N; S) and has an outer side jutting from the tubular support and an inner side constrained to the tubular support, wherein the second axis (M) linking the poles of each magnetic element is transverse to the first axis (A) of the tubular support and the polarity (S; N) of the outer sides of two consecutive magnetic elements along the first axis (A) on the tubular support is alternating.
    Type: Grant
    Filed: June 8, 2018
    Date of Patent: July 12, 2022
    Assignee: KENOSISTEC S.R.L.
    Inventors: Stefano Perugini, Simone Mutti, Michele Abbiati
  • Publication number: 20210242001
    Abstract: A machine for the deposition of material on a substrate by the cathodic sputtering technique is provided, of the type provided with a cathode assembly having a tubular support extending substantially along a first axis (A), and a plurality of magnetic elements constrained to the tubular support and spaced from one another along the first axis (A), and wherein each of the magnetic elements has at least one second axis (M) of magnetic orientation, linking the respective magnetic poles (N; S) and has an outer side jutting from the tubular support and an inner side constrained to the tubular support, wherein the second axis (M) linking the poles of each magnetic element is transverse to the first axis (A) of the tubular support and the polarity (S; N) of the outer sides of two consecutive magnetic elements along the first axis (A) on the tubular support is alternating.
    Type: Application
    Filed: June 8, 2018
    Publication date: August 5, 2021
    Applicant: KENOSISTEC S.R.L.
    Inventors: Stefano PERUGINI, Simone MUTTI, Michele ABBIATI