Abstract: A method of producing microstructures having regions of different structural height includes providing a layer of positive resist material that is sensitive to X-ray radiation with microstructures on a side facing a source of X-rays. Using a mask, the layer of a positive resist material is partially irradiated with the X-rays. The irradiated regions are removed with the aid of a developer.

Abstract: Process for decontaminating an exhaust gas from a fusion reactor fuel cycle of exhaust gas components containing at least one heavy hydrogen isotope selected from tritium and deuterium in compound form, the compound form being ammonia and hydrocarbon, the exhaust gas containing CO and hydrogen isotopes and in which the at least one heavy hydrogen isotope is liberated from its compound, separated out from the exhaust gas and fed back into the fuel cycle, comprising(a) carrying out a catalytic oxidation reaction at a temperature of from 200.degree. C. to 250.degree. C., to oxidize the exhaust gas components, without changing the ammonia, as follows: CO to CO.sub.2, hydrocarbon to CO.sub.2 +water, and the hydrogen isotopes to water,(b) bringing the gas admixture resulting from step (a) into contact with a metal bed at a temperature in the range of 200.degree. C. to 400.degree. C. to selectively transform the water into hydrogen isotopes and to remove O.sub.