Patents Assigned to KETEK GmbH Halbleiter-und Reinraumtechnik
  • X-ray source and transmission window
    Patent number: 12288662
    Abstract: In at least one embodiment an X-ray source includes an electron source configured to emit electrons, an acceleration set-up configured to accelerate the emitted electrons and a transmission window downwards of the acceleration set-up, the transmission window configured to let through X-rays generated by the accelerated electrons, wherein the transmission window incudes a carbon carrier, and wherein the carbon carrier includes sp2-hybridized carbon.
    Type: Grant
    Filed: August 23, 2022
    Date of Patent: April 29, 2025
    Assignee: KETEK GmbH Halbleiter-und Reinraumtechnik
    Inventors: Felix Düsberg, Florian Schneider, Michael Bachmann, Andreas Pahlke
  • Ionization detector and detection method
    Patent number: 12272512
    Abstract: In an embodiment an ionization detector includes a gate-insulator-substrate electron-emission structure (GIS-EE) configured to emit low-energy electrons, a sample chamber configured for at least one gas to be detected, the sample chamber being adjacent to the GIS-EE and a measuring unit configured to detect and/or select charged particles, wherein the charged particles are due to the emitted electrons and/or comprise the emitted electrons.
    Type: Grant
    Filed: May 11, 2023
    Date of Patent: April 8, 2025
    Assignee: KETEK GmbH Halbleiter-und Reinraumtechnik
    Inventors: Michael Bachmann, Andreas Schels, Florian Herdl, Stefan Zimmermann, Simon Edler, Erik Bunert