Abstract: In an electron beam lithography system, a layer of photoresist is exposed in vacuum by a collimated flood beam of electrons passing through an electron mask in nominal contact with the photoresist to define the exposed images. The electron mask includes a mask wafer apertured to define one or more frames supporting one or more panes of electron permeable membrane material having an average atomic number less than 14 and each supporting a patterned layer of electron absorbing material defining the mask patterns. Suitable electron permeable membrane materials include BN, BC, SiC, Si.sub.3 N.sub.4 and Al.sub.4 C.sub.3 of a thickness of 0.1 .mu.m to 2 .mu.m.

Abstract: In an electron spectrometer, electrons emanating from a source are collected and focused to a collimated stream by an electrostatic lens free of spherical aberration. The lens includes a pair of axially spaced concave grids approximating sections of concentric ellipsoids having a common focii and coaxial semi-major axes. The collimated electron stream is inducted into an electric radial cylindrical analyzer for focusing the electrons into radially dispersed lines on a position-sensitive detector with the radial dispersion being a function of their energies. The cylindrical analyzer section subtends an angle of approximately 63.5.degree.. The grid openings in the grids of the electrostatic collimating lens are elongated in a direction transverse to the stream of the electrons passing therethrough and parallel to the radial electric field lines at the entrance to the electric analyzer to reduce the dispersive effect of the grids.

Abstract: An X-ray source apparatus contains an X-ray target which emits X-ray when bombarded with electrons from an electron source. A strong magnetic field, e.g. from a superconducting solenoid, having curved lines of magnetic flux interlinks the target and electron source. The magnetic field has sufficient strength over the entire electron path of travel to constrain the electrons emitted from the source with components at angles to the magnetic field to execute helical paths about the field lines to the target. An aperture means is positioned to block the straight line paths between the source and the target but permits the passage of substantially all electrons traveling along the lines of flux.

Abstract: Charged particles (ions or electrons) are directed into a drift tube closed off at the upstream and downstream ends by electrical grid members and having an axial magnetic field therein with a substantial radial component. The grids are pulsed to trap the charged particles in the drift tube where the radial magnetic field component mixes their axial and orbital momenta. The potential of the downstream grid is successively lowered for successively extracting particles having a successively lower energy. This analyzer is particularly useful for analyzing surface constitutents.

Abstract: A hand held x-ray source includes an x-ray tube and integral generator for exciting the tube at precisely controllable high voltage and direct current levels. The integral generator includes an elongated housing grippable by the hand and an elongated unitary molded block mounted in the housing and thermally sumped thereto. The block defines a first heat conduction fluid fillable cavity for receiving the tube and for providing a high voltage connection to the anode adjacent to the interior end thereof, the block being formed to contain and insulate interconnected elements providing a single voltage multipliers tack, and primary and secondary windings of a single high voltage switching transformer having a ferrite magnetic core external to the block. A heat conduction fluid is disposed between the tube and the block for conducting heat generated during tube operation to the block.

Abstract: An electron spectroscopy system is disclosed which is specially suited for chemical analysis of electrically isolated specimens. X-rays or other ionizing radiation is focused to a relatively small spot on the surface of the electrically isolated sample to be analyzed. An electron energy analyzer has its input optics focused such that the input field of view of the electron energy analyzer is coincident with the beam spot produced by the focused beam of ionizing radiation on the specimen so as to capture secondary photoelectrons emitted from the surface of the sample under analysis. The energies of the secondary photoelectrons are analyzed to obtain a spectrum of the constituents of the surface of the sample under analysis. A flood beam of relatively low energy electrons is directed onto the surface of the sample for neutralizing the positive surface charge in the region of the beam spot.

Abstract: A modular portable X-ray source with integral generator system for generating continuous X-rays of regulated intensity and energy level over a range from zero to maximum and includes a unitary housing containing an X-ray tube, a direct current high voltage power supply for generating a directly controllable, regulated high voltage, a regulated filament supply for generating a directly controllable, regulated beam current, both supplies being directly connected to the X-ray tube without cabling, both supplies being controlled by feedback control signals directly from the X-ray tube, and both being operated directly from a low voltage high current supply, such as a storage battery.

Abstract: A high resolution alpha particle x-ray energy analysis system, particularly useful in detecting light elements, is disclosed wherein magnetic or electrostatic suppression fields prevent charged particles that create background radiation from reaching a windowless energy dispersive x-ray detector.

Abstract: A dynamic background subtraction circuit is disclosed which improves the display resolution of radiation energy spectra, such as X-ray energy spectra in an X-ray energy spectrometer. In this circuit, the number of radiation events (counts) occurring at a reference or background energy level is subtracted from the number of radiation events (counts) occurring at a second energy level under study. The output of this circuit is a real-time (dynamic) approximation of the count rate at the energy level under study, but with resolution improved by subtraction of the background counts.