Patents Assigned to Khuu's Inc.
  • Retaining ring with trigger for chemical mechanical polishing apparatus
    Patent number: 6964597
    Abstract: A retaining ring for chemical mechanical polishing (CMP) apparatus comprising a body of the retaining ring, and a single trigger cavity, or a plurality of trigger cavities. Each trigger cavity formed inside the body of the retaining ring is filed with gas or fluid, and is configured to indicate that thickness of the retaining ring is less than or equal to a predetermined thickness threshold.
    Type: Grant
    Filed: June 27, 2003
    Date of Patent: November 15, 2005
    Assignee: Khuu's Inc.
    Inventor: Peter Khuu