Patents Assigned to Kiel University
  • Device for etching semiconductors with a large surface area
    Patent number: 7208069
    Abstract: The device etches semiconductors with a large surface area in a trough-shaped receptacle containing a liquid electrolyte. A sample head is mounted inside the etching trough, and is provided with a device for holding at least one semiconductor wafer. The device is tilted to promote turbulent electrolyte flow in a space between a bottom surface of the semiconductor wafer and top surface of the trough-shaped receptacle.
    Type: Grant
    Filed: July 24, 2003
    Date of Patent: April 24, 2007
    Assignee: Kiel University
    Inventors: Marc Christophersen, Jörg Bahr, Jürgen Carstensen, Kay Steen, Georgi Popkirov, Helmut Föll