Abstract: Synthetic quartz glass powder is produced by (a) hydrolyzing an alkoxysilane to form a gel, (b) finely dividing the gel and then drying, or drying the gel and then finely dividing, and (c) calcining the obtained powder, the powder being maintained under an atmosphere with an oxygen concentration of not less than 30 vol % during at least a part of the calcining period at a temperature of not lower than 1,000.degree. C.
Type:
Grant
Filed:
June 14, 1994
Date of Patent:
May 14, 1996
Assignee:
Kimmon Manufacturing Co., Ltd. and Mitsubishi Chemical Corporation