Patents Assigned to Kinetics Systems, Inc.
  • Patent number: 7506593
    Abstract: The present invention relates to equipment for supporting microfabrication tools, and in particular, to microfabrication tool pedestals including adjustable supports. According to one embodiment of the present invention, a pedestal for a microfabrication tool is provided. The pedestal includes a frame constructed and arranged to support the microfabrication tool and a plurality of supports movable along and connected to the frame. According to another embodiment of the present invention, a method of providing a supporting for a microfabrication tool is provided. The method includes providing a pedestal comprising a frame constructed and arranged to support the microfabrication tool and a plurality of supports connected to the frame, and laterally repositioning the supports relative to the frame.
    Type: Grant
    Filed: October 23, 2002
    Date of Patent: March 24, 2009
    Assignee: Kinetics Systems, Inc.
    Inventor: William D. Strabel, III