Patents Assigned to King Abdullah University of Science ang Technology
  • MEMS MASS-SPRING-DAMPER SYSTEMS USING AN OUT-OF-PLANE SUSPENSION SCHEME
    Publication number: 20110030472
    Abstract: MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed.
    Type: Application
    Filed: May 27, 2010
    Publication date: February 10, 2011
    Applicant: King Abdullah University of Science ang Technology
    Inventors: Ahmed Kamal Said Abdel Aziz, Abdel Hameed Sharaf, Mohamed Yousef Serry, Sherif Salah Sedky