Abstract: By preventing a twist of the diaphragm when assembled, various adverse effects arising from such a twist of the diaphragm are completely eliminated. Provided is a set of jigs for assembling a valve including a pair of above and below fixing jigs, a rotation-stop jig, and a fixing means: the rotation-stop jig is inserted and fixed to the above fixing jig in a non-rotational state; the fixing means fixes non-rotatably and attachably the rotation-stop jig and a bonnet of the valve to each other; a body of the valve is inserted and fixed to the below fixing jig in a non-rotational state; the bonnet and the body are fixed independently from each other in a non-rotational state, thereby preventing an outer periphery of a diaphragm from twisting in which a lower surface of an outer periphery of the bonnet and an outer seal part of the body are tightly attached to and hold the outer periphery of the diaphragm.

Abstract: A one-touch valve including a valve main body (1) having a valve body incorporated therein, a stem (3) mounted on the valve main body, a rotating handle (6) fixedly attached to an upper part of the stem, a holder (21) accommodated in the rotating handle, and a lock mechanism (10) arranged in the holder and the rotating handle. The lock mechanism is formed of a spring inserted into the holder, a spherical body provided on a lower spring-back side of the spring, a lock member having a midway on a rear end side axially attached to the holder, having a rear end part pressed by spring-back via the spherical body, and having a tip part side abutting on a lower edge part of the rotating handle in a spring-back state, and an engagement groove where the tip end part side of the lock member is locked by the rotating handle.

Abstract: A compact vacuum gate valve capable of reducing a kink and sliding between a seal material and a seal surface, achieving a low occurrence of particles, stably and reliably performing valve-body open-close movements, restricting impulsive sound and vibrations, and also having high durability. The vacuum gate valve includes housing bodies, a valve-body open/close driving body, and a stem provided with a valve body. Each of the housing bodies has therein a piston rod and a cam member with a cam groove. On each side of the valve-body open/close driving body, a cam roller and a fulcrum roller are provided. On an inner side of the housing body, a vertical movement guiding part and a stopper part are provided. A spring for causing the valve-body open/close driving body to ascend is provided between the valve-body open/close driving body and a fixed base part on a fixed side.

Abstract: A vacuum bellows hot valve with durability and drivability not impaired by increased temperature and voltage of a heating device while having a simple, compact structure, the valve also allowing temperature control with high accuracy. In the vacuum bellows hot valve, a stem is provided inside a valve box with an inflow port and an outflow port so as to freely ascend and descend, a bellows is elastically provided to a valve body provided at a lower end of the stem and on an outer circumferential side of the stem, a cylindrical ceramic heater is arranged between an inner circumference of the bellows and an outer circumference of the stem, and a temperature measuring part of a thermocouple for control is arranged at a position close to the valve body.

Abstract: A diaphragm valve and a flow rate control device for a semiconductor manufacturing apparatus are configured so as to allow an increase of a valve flow rate while avoiding an increase in size of the valve. The diaphragm valve includes a diaphragm with an outer periphery being pressed and a valve seat part in a valve chamber of a body having an inflow path and an outflow path, with the diaphragm being configured to open and close the valve chamber by an ascending/descending motion of a stem. The diaphragm has a substantially-flat cross sectional form having a substantially-planar center region and a boundary region. The boundary region is on an outer peripheral side of the center region and has a radius of curvature smaller than that of the center region, and the boundary region is positioned near an outer peripheral side of the valve seat part.

Abstract: A diaphragm valve includes a valve seat disposed in a valve chamber in a body, an annular groove provided on the outer periphery of the valve seat, a diaphragm provided so as to be able to make contact with and leave the valve seat via a pressurizing device, and a primary-side flow path communicating the valve chamber, in which an inner diameter of a secondary-side flow path contiguously provided to the annular groove is 2.0 to 4.5 times a groove width of the annular groove, and an intersection cross-sectional area between the annular groove and the secondary-side flow path is smaller than a cross-sectional area of the secondary-side flow path and the intersection cross-sectional area is configured to be equal to or larger than 35% with respect to a sectional area of the secondary-side flow path to acquire a predetermined Cv value.

Abstract: Provided is a valve actuator in a simple structure and easily downsizable, having reliable valve openability and closability even under high pressure, and also capable of exerting high durability even with a high frequency of valve opening and closing, and a diaphragm valve including this valve actuator. In the valve actuator, a repulsive member provided in an actuator main body, a piston pressed by this repulsive member, and at least two air chambers for moving the piston by an air pressure are arranged and a booster mechanism for exerting a force amplified in a valve-closing direction is accommodated in any of the air chambers.

Abstract: A metal diaphragm valve includes a body with a valve seat provided to a valve chamber communicating a primary flow path and a secondary flow path, a metal diaphragm having a center portion disposed above the valve chamber, the center portion vertically moving to make contact with the valve seat, and a stem provided above the metal diaphragm so as to be able to freely ascend and descend to cause the center portion of the metal diaphragm to move downward. A flow-path restriction part is provided to a part of the secondary flow path. The metal diaphragm valve is quite suitable as a valve for ALD process, the valve favorably reduces fluctuations of a Cv value due to deformation of a resin-made valve seat with time even after the valve is opened and closed at a level of ten million times while a fluid at high temperatures is flowing.

Abstract: A diaphragm valve assembling method including steps through which a twist of the diaphragm when assembled is prevented: a step of inserting a bonnet which pressurizes an outer periphery of a diaphragm into a body having a valve seat provided to a valve chamber and the diaphragm arranged thereabove; a step of screwing a fastening nut to an opening and inserting the fastening nut to an outer periphery of the bonnet; a step of fixing a rotation-stop jig inserted through a through hole of the fastening nut and the bonnet via fixing means; and a step of fixing the body and the rotation-stop jig via a fixing jig and fastening the fastening nut, with the bonnet being in a non-rotational state, to tightly attach the bonnet to an outer seal part of the diaphragm.

Abstract: To provide a fluid control valve for use under high-temperature conditions and capable of achieving high durability and Cv value stability even with many operations, and a method of assembling the fluid control valve, a fluid control valve includes an annular valve seat provided inside a body having an inflow port and an outflow port and a diaphragm opposed to the annular valve seat to be in contact therewith or away therefrom by an ascending/descending motion of an actuator rod or a manual rod. A contact surface, which is an upper surface of the annular valve seat, to be in contact with and away from the diaphragm has a tapered surface formed along a centripetal direction of the annular valve seat.

Abstract: An attachment structure for an actuator-specific solenoid valve and an actuator-quipped valve. The attachment structure can be easily applied to or released from any actuator and a solenoid valve, and the solenoid valve can be easily attached to and removed from any position in a side-surface circumferential direction without impairing compactability of the actuator. The attachment structure for an actuator-specific solenoid valve includes a base body provided on a lower part of a cylindrical actuator and an attachment member removably attachable externally from a main body of the actuator, the attachment member having a fixing part formed as being extended at a position close to a side surface of the main body of the actuator and a solenoid valve for fluid control attached to the fixing part, and the attachment member fixing the solenoid valve being provided rotatably about a side surface of the main body of the actuator.

Abstract: A block valve and a block valve for a raw material container having a structure in which a retaining part of a liquid material or cleaning fluid is not present inside. In the block valve, a first side of a main flow path in communication with a supply route of a block body and a first minimal port part of a first diaphragm valve in a tilted state with respect to the block body are connected, a second side of the main flow path and a second minimal port part of a second diaphragm valve are connected, a port opening of the second diaphragm valve is in communication with a supply port part, and a joint port part of the first diaphragm valve and a connection line in a vertical direction are connected by a communication path.

Abstract: A treatment device treats a treatment subject inside a treatment chamber with treatment fluids of a plurality of types. An exhaust switching unit is provided to an exhaust pipe connected to the inside of the treatment chamber, and the exhaust switching unit is formed of a distribution box, switching valve boxes, and an exhaust tube. Additionally, the switching valve boxes, which correspond in number to the treatment fluids, are connected to the distribution box in a parallel state.

Abstract: A vacuum gate valve includes a valve body open/close drive body provided between opposing housing bodies, a stem of the valve body open/close drive body, and a valve body provided to the stem. The housing bodies each has a piston rod vertically moving by a cylinder mechanism, a cam member of the piston rod, and a cam roller provided in a cam groove formed in the cam member. A spring receiving unit on both sides of the valve body open/close drive body and a spring which causes the spring receiving unit to be disposed in the cam member and resiliently supported between the spring receiving unit and the piston rod are provided. The housing body includes a vertical-movement guiding unit in which the valve body open/close driving body vertically moves between the housing bodies and a stopper by which the valve body open/close drive body is locked at ascending.

Abstract: Provided are a diaphragm valve and a flow rate control device for a semiconductor manufacturing apparatus simply and optimally configured so as to allow a reliable increase of a valve flow rate while avoiding an increase in size of the valve due to an increase in diameter of a valve seat, an increase in stroke, or the like and also allow durability and the life of the valve to be maintained or improved. That is, a diaphragm valve includes a diaphragm with an outer periphery being pressed and a valve seat part in a valve chamber of a body having an inflow path and an outflow path, this diaphragm is provided so as to be able to open and close the valve chamber by an ascending/descending motion of a stem.

Abstract: A valve with a locking mechanism and an integrated valve are provided. The valve includes a handle body having a knob, the handle body being disposed rotatably on top of a valve body housing a valve shaft for opening and closing a valve piece. A cutout stepped face is formed on a part of the outer periphery of the valve body located under the handle body. A locking plate having a locking hole is placed rotatably in the cutout stepped face via a pivotally attaching portion, and when the locking plate is rotated to either a position at which the valve body is in a full-close state or a position at which the valve body is in a full-open state, the locking hole is faced the upper surface area of the valve body to allow locking.

Abstract: A resin end-face butt joint, a method for welding the joints, and a piping member ensure a sufficient clamping margin with the clamp of an ordinary welding machine, and ensure an appropriate distance between the centers even when joints having short tubular welding ring parts are welded. It is also possible to align the centers by positioning the centers along the same axis. The resin end-face butt joint includes multiple welding ring parts which communicate with a flow path within a joint base part and which are provided on the joint base part. Fastening parts are coaxial with at least one of these welding ring parts at the outer end of the joint for the purpose of clamping a welding machine.

Abstract: A butterfly pressure control valve including a valve opening/closing mechanism (10) which includes: a valve body (11) rotatable in a direction perpendicular to a channel (4) in a body; a sheet ring (12) which can move a valve-seat sealing part toward and away from the valve body by making reciprocating movements in a direction of the channel; a cam mechanism (13) which separates the sheet ring (12) from the valve body (11) and rotates the valve body; and a reciprocating movement mechanism (14) which causes the sheet ring (12) to make reciprocating movements in a direction of the valve body, wherein the valve opening/closing mechanism (10) is an opening/closing mechanism which controls pressure in the channel (4) by rotating the valve body (11) without sliding with the sheet ring (12).

Abstract: A treatment device (1) which treats a treatment subject inside a treatment chamber (2) with treatment fluids of a plurality of types. An exhaust switching unit (3) is provided to an exhaust pipe (4) connected to the inside of the treatment chamber (2). The exhaust switching unit (3) is formed of a distribution box (8), switching valve boxes (9), and an exhaust tube (12). And the switching valve boxes (9), which correspond in number to the treatment fluids, are connected to the distribution box (8) in a parallel state.

Abstract: A butterfly pressure control valve including a valve opening/closing mechanism (10) which includes: a valve body (11) rotatable in a direction perpendicular to a channel (4) in a body; a sheet ring (12) which can move a valve-seat sealing part toward and away from the valve body by making reciprocating movements in a direction of the channel; a cam mechanism (13) which separates the sheet ring (12) from the valve body (11) and rotates the valve body ; and a reciprocating movement mechanism (14) which causes the sheet ring (12) to make reciprocating movements in a direction of the valve body, wherein the valve opening/closing mechanism (10) is an opening/closing mechanism which controls pressure in the channel (4) by rotating the valve body (11) without sliding with the sheet ring (12).