Abstract: Cadmium-tin oxide films are prepared by d-c reactive sputtering of Cd-Sn alloys in Ar-O.sub.2 mixtures. The films obtained have low resistivity of the order of 10.sup.-3 -10.sup.-4 .OMEGA.-cm and high optical transparency depending upon deposition conditions.
Abstract: Cadmium-tin oxide films are prepared by d-c reactive sputtering of Cd-Sn alloys in Ar-O.sub.2 mixtures. The films obtained have low resistivity of the order of 10.sup.-3 -10.sup.-4 .OMEGA.-cm and high optical transparency depending upon deposition conditions.